CO2 laser annealing of Al/a-Si:H contact

Helena Gleskova, V. V. Ilchenko, V. A. Skryshevsky, V. I. Strikha

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


he paper concerns the possibility of using CW (continuous wave) CO2-laser annealing (λ=10.6 μm, P≤ 100 W/cm2) for formation of a barrier in the Al/a-Si:H/SS (SS-stainless steel) structures with good rectifying I V characteristics. The infrared absorption spectra, photoelectric properties, temperature effect on the conductivity and saturation current were analyzed and various contact models are discussed.
Original languageEnglish
Pages (from-to)169-178
Number of pages10
JournalCzechoslovak Journal of Physics
Issue number2
Publication statusPublished - 1993


  • laser annealing
  • infrared absorption spectra
  • photoelectric properties


Dive into the research topics of 'CO2 laser annealing of Al/a-Si:H contact'. Together they form a unique fingerprint.

Cite this