CO2 laser annealing of Al/a-Si:H contact

Helena Gleskova, V. V. Ilchenko, V. A. Skryshevsky, V. I. Strikha

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Abstract

he paper concerns the possibility of using CW (continuous wave) CO2-laser annealing (λ=10.6 μm, P≤ 100 W/cm2) for formation of a barrier in the Al/a-Si:H/SS (SS-stainless steel) structures with good rectifying I V characteristics. The infrared absorption spectra, photoelectric properties, temperature effect on the conductivity and saturation current were analyzed and various contact models are discussed.
Original languageEnglish
Pages (from-to)169-178
Number of pages10
JournalCzechoslovak Journal of Physics
Volume43
Issue number2
DOIs
Publication statusPublished - 1993

Keywords

  • laser annealing
  • infrared absorption spectra
  • photoelectric properties

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