CO2 laser annealing of Al/a-Si:H contact

Helena Gleskova; V. V. Ilchenko; V. A. Skryshevsky; V. I. Strikha

doi:10.1007/BF01589639

CO2 laser annealing of Al/a-Si:H contact

Helena Gleskova, V. V. Ilchenko, V. A. Skryshevsky, V. I. Strikha

Electronic And Electrical Engineering

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

he paper concerns the possibility of using CW (continuous wave) CO2-laser annealing (λ=10.6 μm, P≤ 100 W/cm2) for formation of a barrier in the Al/a-Si:H/SS (SS-stainless steel) structures with good rectifying I V characteristics. The infrared absorption spectra, photoelectric properties, temperature effect on the conductivity and saturation current were analyzed and various contact models are discussed.

Original language	English
Pages (from-to)	169-178
Number of pages	10
Journal	Czechoslovak Journal of Physics
Volume	43
Issue number	2
DOIs	https://doi.org/10.1007/BF01589639
Publication status	Published - 1993

Keywords

laser annealing
infrared absorption spectra
photoelectric properties

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10.1007/BF01589639

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@article{d73b322d44c14f0587f9fd3235ae00b1,

title = "CO2 laser annealing of Al/a-Si:H contact",

abstract = "he paper concerns the possibility of using CW (continuous wave) CO2-laser annealing (λ=10.6 μm, P≤ 100 W/cm2) for formation of a barrier in the Al/a-Si:H/SS (SS-stainless steel) structures with good rectifying I V characteristics. The infrared absorption spectra, photoelectric properties, temperature effect on the conductivity and saturation current were analyzed and various contact models are discussed.",

keywords = "laser annealing , infrared absorption spectra , photoelectric properties",

author = "Helena Gleskova and Ilchenko, {V. V.} and Skryshevsky, {V. A.} and Strikha, {V. I.}",

year = "1993",

doi = "10.1007/BF01589639",

language = "English",

volume = "43",

pages = "169--178",

journal = "Czechoslovak Journal of Physics",

issn = "0011-4626",

number = "2",

}

TY - JOUR

T1 - CO2 laser annealing of Al/a-Si:H contact

AU - Gleskova, Helena

AU - Ilchenko, V. V.

AU - Skryshevsky, V. A.

AU - Strikha, V. I.

PY - 1993

Y1 - 1993

N2 - he paper concerns the possibility of using CW (continuous wave) CO2-laser annealing (λ=10.6 μm, P≤ 100 W/cm2) for formation of a barrier in the Al/a-Si:H/SS (SS-stainless steel) structures with good rectifying I V characteristics. The infrared absorption spectra, photoelectric properties, temperature effect on the conductivity and saturation current were analyzed and various contact models are discussed.

AB - he paper concerns the possibility of using CW (continuous wave) CO2-laser annealing (λ=10.6 μm, P≤ 100 W/cm2) for formation of a barrier in the Al/a-Si:H/SS (SS-stainless steel) structures with good rectifying I V characteristics. The infrared absorption spectra, photoelectric properties, temperature effect on the conductivity and saturation current were analyzed and various contact models are discussed.

KW - laser annealing

KW - infrared absorption spectra

KW - photoelectric properties

U2 - 10.1007/BF01589639

DO - 10.1007/BF01589639

M3 - Article

SN - 0011-4626

VL - 43

SP - 169

EP - 178

JO - Czechoslovak Journal of Physics

JF - Czechoslovak Journal of Physics

IS - 2

ER -

CO2 laser annealing of Al/a-Si:H contact

Abstract

Keywords

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