Chemical mechanical planarization

David Lee Butler

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Original language	English
Title of host publication	Nanofinishing Science and Technology
Subtitle of host publication	Basic and Advanced Finishing and Polishing Processes
Place of Publication	Florida
Pages	597-616
Number of pages	20
Publication status	Published - 22 Dec 2016

Name	Micro and Nano Manufacturing
Publisher	CRC Press

Cite this

@inbook{b01405a0a6d14bc699b1d00529c665bc,

title = "Chemical mechanical planarization",

author = "Butler, {David Lee}",

year = "2016",

month = dec,

day = "22",

language = "English",

isbn = "9781498745949 ",

series = "Micro and Nano Manufacturing",

publisher = "CRC Press",

pages = "597--616",

booktitle = "Nanofinishing Science and Technology",

}