Chemical mechanical planarization

Research output: Chapter in Book/Report/Conference proceedingChapter

LanguageEnglish
Title of host publicationNanofinishing Science and Technology
Subtitle of host publicationBasic and Advanced Finishing and Polishing Processes
Place of PublicationFlorida
Pages597-616
Number of pages20
Publication statusPublished - 22 Dec 2016

Publication series

NameMicro and Nano Manufacturing
PublisherCRC Press

Cite this

Butler, D. L. (2016). Chemical mechanical planarization. In Nanofinishing Science and Technology: Basic and Advanced Finishing and Polishing Processes (pp. 597-616). (Micro and Nano Manufacturing). Florida.
Butler, David Lee. / Chemical mechanical planarization. Nanofinishing Science and Technology: Basic and Advanced Finishing and Polishing Processes. Florida, 2016. pp. 597-616 (Micro and Nano Manufacturing).
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author = "Butler, {David Lee}",
year = "2016",
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language = "English",
isbn = "9781498745949",
series = "Micro and Nano Manufacturing",
publisher = "CRC Press",
pages = "597--616",
booktitle = "Nanofinishing Science and Technology",

}

Butler, DL 2016, Chemical mechanical planarization. in Nanofinishing Science and Technology: Basic and Advanced Finishing and Polishing Processes. Micro and Nano Manufacturing, Florida, pp. 597-616.

Chemical mechanical planarization. / Butler, David Lee.

Nanofinishing Science and Technology: Basic and Advanced Finishing and Polishing Processes. Florida, 2016. p. 597-616 (Micro and Nano Manufacturing).

Research output: Chapter in Book/Report/Conference proceedingChapter

TY - CHAP

T1 - Chemical mechanical planarization

AU - Butler, David Lee

PY - 2016/12/22

Y1 - 2016/12/22

UR - https://www.crcpress.com/9781498745949

M3 - Chapter

SN - 9781498745949

T3 - Micro and Nano Manufacturing

SP - 597

EP - 616

BT - Nanofinishing Science and Technology

CY - Florida

ER -

Butler DL. Chemical mechanical planarization. In Nanofinishing Science and Technology: Basic and Advanced Finishing and Polishing Processes. Florida. 2016. p. 597-616. (Micro and Nano Manufacturing).