Chemical mechanical planarization

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationNanofinishing Science and Technology
Subtitle of host publicationBasic and Advanced Finishing and Polishing Processes
Place of PublicationFlorida
Pages597-616
Number of pages20
Publication statusPublished - 22 Dec 2016

Publication series

NameMicro and Nano Manufacturing
PublisherCRC Press

Cite this

Butler, D. L. (2016). Chemical mechanical planarization. In Nanofinishing Science and Technology: Basic and Advanced Finishing and Polishing Processes (pp. 597-616). (Micro and Nano Manufacturing)..