Characterization of custom-made thin film AlN MEMS ultrasound transducers

Research output: Contribution to conferenceAbstract

Abstract

Photoacoustic (PA) imaging and sensing has attracted a lot of attention in biomedical applications. This is due to its potential in improved specificity and resolution when compared to using ultrasound as imaging source [1]. In the presented work we focus on the miniaturization of custom MEMS ultrasound receivers for applications in PA detection. These devices are of interest as they can lead to broad bandwidth transducers and have the potential for mass production with a reduction in cost [2]. The array of MEMS ultrasound receivers are fabricated using a cost-efficient multi-user process (PiezoMUMPs) and consist of a 500 nm thick film of aluminium nitride as piezo-active layer on a 10 µm thick silicon-on-insulator wafer. A multi-element single bandwidth and a multi-bandwidth MEMS chip have been designed with a centre frequency of 1.3 MHz and centre frequencies of 1.15 MHz, 0.75 MHz, 0.45 MHz, 0.3 MHz (smallest to largest diameter), respectively (see Fig. 1). The designs were immersed in an oil bath and characterized using the pitch-catch technique and PA excitation. The PA excitation was generated using a 10 ns Nd:YAG laser (Brilliant B, Quantel) at 532 nm and a pulse repetition frequency of 10 Hz with pulse energies of 2.6 mJ, focussed with a 30 mm lens onto a highly absorbing gelatine phantom. The devices’ performance in ultrasound and PA wave detection will be shown and their advantages discussed.

Conference

Conference6th International Symposium on Laser Ultrasonics
Abbreviated titleLU2018
CountryUnited Kingdom
CityNottingham
Period9/07/1813/07/18
Internet address

Fingerprint

microelectromechanical systems
transducers
bandwidth
thin films
receivers
costs
aluminum nitrides
miniaturization
pulses
excitation
thick films
YAG lasers
baths
repetition
oils
chips
lenses
insulators
wafers
silicon

Keywords

  • photoacoustic (PA) imaging
  • sensors
  • biomedical imaging
  • PA wave detection

Cite this

Kusch, J., Flockhart, G. M. H., Bauer, R., & Uttamchandani, D. (2018). Characterization of custom-made thin film AlN MEMS ultrasound transducers. P.07. Abstract from 6th International Symposium on Laser Ultrasonics , Nottingham, United Kingdom.
Kusch, J ; Flockhart, G M H ; Bauer, R ; Uttamchandani, D. / Characterization of custom-made thin film AlN MEMS ultrasound transducers. Abstract from 6th International Symposium on Laser Ultrasonics , Nottingham, United Kingdom.1 p.
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Kusch, J, Flockhart, GMH, Bauer, R & Uttamchandani, D 2018, 'Characterization of custom-made thin film AlN MEMS ultrasound transducers' 6th International Symposium on Laser Ultrasonics , Nottingham, United Kingdom, 9/07/18 - 13/07/18, pp. P.07.

Characterization of custom-made thin film AlN MEMS ultrasound transducers. / Kusch, J; Flockhart, G M H; Bauer, R; Uttamchandani, D.

2018. P.07 Abstract from 6th International Symposium on Laser Ultrasonics , Nottingham, United Kingdom.

Research output: Contribution to conferenceAbstract

TY - CONF

T1 - Characterization of custom-made thin film AlN MEMS ultrasound transducers

AU - Kusch, J

AU - Flockhart, G M H

AU - Bauer, R

AU - Uttamchandani, D

PY - 2018/7/13

Y1 - 2018/7/13

N2 - Photoacoustic (PA) imaging and sensing has attracted a lot of attention in biomedical applications. This is due to its potential in improved specificity and resolution when compared to using ultrasound as imaging source [1]. In the presented work we focus on the miniaturization of custom MEMS ultrasound receivers for applications in PA detection. These devices are of interest as they can lead to broad bandwidth transducers and have the potential for mass production with a reduction in cost [2]. The array of MEMS ultrasound receivers are fabricated using a cost-efficient multi-user process (PiezoMUMPs) and consist of a 500 nm thick film of aluminium nitride as piezo-active layer on a 10 µm thick silicon-on-insulator wafer. A multi-element single bandwidth and a multi-bandwidth MEMS chip have been designed with a centre frequency of 1.3 MHz and centre frequencies of 1.15 MHz, 0.75 MHz, 0.45 MHz, 0.3 MHz (smallest to largest diameter), respectively (see Fig. 1). The designs were immersed in an oil bath and characterized using the pitch-catch technique and PA excitation. The PA excitation was generated using a 10 ns Nd:YAG laser (Brilliant B, Quantel) at 532 nm and a pulse repetition frequency of 10 Hz with pulse energies of 2.6 mJ, focussed with a 30 mm lens onto a highly absorbing gelatine phantom. The devices’ performance in ultrasound and PA wave detection will be shown and their advantages discussed.

AB - Photoacoustic (PA) imaging and sensing has attracted a lot of attention in biomedical applications. This is due to its potential in improved specificity and resolution when compared to using ultrasound as imaging source [1]. In the presented work we focus on the miniaturization of custom MEMS ultrasound receivers for applications in PA detection. These devices are of interest as they can lead to broad bandwidth transducers and have the potential for mass production with a reduction in cost [2]. The array of MEMS ultrasound receivers are fabricated using a cost-efficient multi-user process (PiezoMUMPs) and consist of a 500 nm thick film of aluminium nitride as piezo-active layer on a 10 µm thick silicon-on-insulator wafer. A multi-element single bandwidth and a multi-bandwidth MEMS chip have been designed with a centre frequency of 1.3 MHz and centre frequencies of 1.15 MHz, 0.75 MHz, 0.45 MHz, 0.3 MHz (smallest to largest diameter), respectively (see Fig. 1). The designs were immersed in an oil bath and characterized using the pitch-catch technique and PA excitation. The PA excitation was generated using a 10 ns Nd:YAG laser (Brilliant B, Quantel) at 532 nm and a pulse repetition frequency of 10 Hz with pulse energies of 2.6 mJ, focussed with a 30 mm lens onto a highly absorbing gelatine phantom. The devices’ performance in ultrasound and PA wave detection will be shown and their advantages discussed.

KW - photoacoustic (PA) imaging

KW - sensors

KW - biomedical imaging

KW - PA wave detection

M3 - Abstract

SP - P.07

ER -

Kusch J, Flockhart GMH, Bauer R, Uttamchandani D. Characterization of custom-made thin film AlN MEMS ultrasound transducers. 2018. Abstract from 6th International Symposium on Laser Ultrasonics , Nottingham, United Kingdom.