Characterization of a fast piezoelectric varifocal MEMS mirror

Research output: Contribution to conferencePaper

2 Citations (Scopus)
60 Downloads (Pure)

Abstract

We present the characterization of a novel design for a varifocal MEMS mirror with piezoelectric actuation and defocus movement up to 100 kHz. The device was simulated using a finite-element method, fabricated using a multi-user silicon-oninsulator process, and its mechanical response to piezoelectric actuation evaluated through laser vibrometry and a dynamic white-light interferometer.
Original languageEnglish
Number of pages2
Publication statusPublished - 29 Jul 2018
EventConference on Optical MEMS and Nanophotonics 2018 - Ecole Polyechnique Fédérale de Lausanne, Lausanne, Switzerland
Duration: 29 Jul 20182 Aug 2018
https://omn2018.epfl.ch/

Conference

ConferenceConference on Optical MEMS and Nanophotonics 2018
Abbreviated titleOMN 2018
CountrySwitzerland
CityLausanne
Period29/07/182/08/18
Internet address

Keywords

  • optical MEMS
  • piezoelectric
  • varifocal mirror
  • high frequency

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  • Research Output

    • 2 Citations
    • 1 Abstract

    Fast piezoelectric scanning MEMS mirror for 1D ion adressing

    Janin, P., Bauer, R., Griffin, P., Riis, E. & Uttamchandani, D., 9 Dec 2019. 2 p.

    Research output: Contribution to conferenceAbstract

    Open Access
    File
  • 40 Downloads (Pure)

    Activities

    • 1 Participation in conference

    Conference on Optical MEMS and Nanophotonics 2018

    Ralf Bauer (Participant)

    29 Jul 20182 Aug 2018

    Activity: Participating in or organising an event typesParticipation in conference

    Cite this

    Janin, P., Bauer, R., Griffin, P., Riis, E., & Uttamchandani, D. (2018). Characterization of a fast piezoelectric varifocal MEMS mirror. Paper presented at Conference on Optical MEMS and Nanophotonics 2018, Lausanne, Switzerland.