Characterization of a fast piezoelectric varifocal MEMS mirror

Research output: Contribution to conferencePaper

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Abstract

We present the characterization of a novel design for a varifocal MEMS mirror with piezoelectric actuation and defocus movement up to 100 kHz. The device was simulated using a finite-element method, fabricated using a multi-user silicon-oninsulator process, and its mechanical response to piezoelectric actuation evaluated through laser vibrometry and a dynamic white-light interferometer.
Original languageEnglish
Number of pages2
Publication statusPublished - 29 Jul 2018
EventConference on Optical MEMS and Nanophotonics 2018 - Ecole Polyechnique Fédérale de Lausanne, Lausanne, Switzerland
Duration: 29 Jul 20182 Aug 2018
https://omn2018.epfl.ch/

Conference

ConferenceConference on Optical MEMS and Nanophotonics 2018
Abbreviated titleOMN 2018
CountrySwitzerland
CityLausanne
Period29/07/182/08/18
Internet address

Fingerprint

actuation
Interferometers
microelectromechanical systems
MEMS
Mirrors
mirrors
Finite element method
Silicon
Lasers
finite element method
interferometers
silicon
lasers

Keywords

  • optical MEMS
  • piezoelectric
  • varifocal mirror
  • high frequency

Cite this

Janin, P., Bauer, R., Griffin, P., Riis, E., & Uttamchandani, D. (2018). Characterization of a fast piezoelectric varifocal MEMS mirror. Paper presented at Conference on Optical MEMS and Nanophotonics 2018, Lausanne, Switzerland.
Janin, Paul ; Bauer, Ralf ; Griffin, Paul ; Riis, Erling ; Uttamchandani, Deepak. / Characterization of a fast piezoelectric varifocal MEMS mirror. Paper presented at Conference on Optical MEMS and Nanophotonics 2018, Lausanne, Switzerland.2 p.
@conference{b94a4ce688f34e7d9d8c55c14bf081f6,
title = "Characterization of a fast piezoelectric varifocal MEMS mirror",
abstract = "We present the characterization of a novel design for a varifocal MEMS mirror with piezoelectric actuation and defocus movement up to 100 kHz. The device was simulated using a finite-element method, fabricated using a multi-user silicon-oninsulator process, and its mechanical response to piezoelectric actuation evaluated through laser vibrometry and a dynamic white-light interferometer.",
keywords = "optical MEMS, piezoelectric, varifocal mirror, high frequency",
author = "Paul Janin and Ralf Bauer and Paul Griffin and Erling Riis and Deepak Uttamchandani",
year = "2018",
month = "7",
day = "29",
language = "English",
note = "Conference on Optical MEMS and Nanophotonics 2018, OMN 2018 ; Conference date: 29-07-2018 Through 02-08-2018",
url = "https://omn2018.epfl.ch/",

}

Janin, P, Bauer, R, Griffin, P, Riis, E & Uttamchandani, D 2018, 'Characterization of a fast piezoelectric varifocal MEMS mirror' Paper presented at Conference on Optical MEMS and Nanophotonics 2018, Lausanne, Switzerland, 29/07/18 - 2/08/18, .

Characterization of a fast piezoelectric varifocal MEMS mirror. / Janin, Paul; Bauer, Ralf; Griffin, Paul; Riis, Erling; Uttamchandani, Deepak.

2018. Paper presented at Conference on Optical MEMS and Nanophotonics 2018, Lausanne, Switzerland.

Research output: Contribution to conferencePaper

TY - CONF

T1 - Characterization of a fast piezoelectric varifocal MEMS mirror

AU - Janin, Paul

AU - Bauer, Ralf

AU - Griffin, Paul

AU - Riis, Erling

AU - Uttamchandani, Deepak

PY - 2018/7/29

Y1 - 2018/7/29

N2 - We present the characterization of a novel design for a varifocal MEMS mirror with piezoelectric actuation and defocus movement up to 100 kHz. The device was simulated using a finite-element method, fabricated using a multi-user silicon-oninsulator process, and its mechanical response to piezoelectric actuation evaluated through laser vibrometry and a dynamic white-light interferometer.

AB - We present the characterization of a novel design for a varifocal MEMS mirror with piezoelectric actuation and defocus movement up to 100 kHz. The device was simulated using a finite-element method, fabricated using a multi-user silicon-oninsulator process, and its mechanical response to piezoelectric actuation evaluated through laser vibrometry and a dynamic white-light interferometer.

KW - optical MEMS

KW - piezoelectric

KW - varifocal mirror

KW - high frequency

M3 - Paper

ER -

Janin P, Bauer R, Griffin P, Riis E, Uttamchandani D. Characterization of a fast piezoelectric varifocal MEMS mirror. 2018. Paper presented at Conference on Optical MEMS and Nanophotonics 2018, Lausanne, Switzerland.