Characterization of a fast piezoelectric varifocal MEMS mirror

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We present the characterization of a novel design for a varifocal MEMS mirror with piezoelectric actuation and defocus movement up to 100 kHz. The device was simulated using a finite-element method, fabricated using a multi-user silicon-oninsulator process, and its mechanical response to piezoelectric actuation evaluated through laser vibrometry and a dynamic white-light interferometer.
Original languageEnglish
Number of pages2
Publication statusPublished - 29 Jul 2018
EventConference on Optical MEMS and Nanophotonics 2018 - Ecole Polyechnique Fédérale de Lausanne, Lausanne, Switzerland
Duration: 29 Jul 20182 Aug 2018


ConferenceConference on Optical MEMS and Nanophotonics 2018
Abbreviated titleOMN 2018
Internet address


  • optical MEMS
  • piezoelectric
  • varifocal mirror
  • high frequency


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