Characterization of a fast piezoelectric varifocal MEMS mirror

Paul Janin; Ralf Bauer; Paul Griffin; Erling Riis; Deepak Uttamchandani

Characterization of a fast piezoelectric varifocal MEMS mirror

Paul Janin, Ralf Bauer, Paul Griffin, Erling Riis, Deepak Uttamchandani

Research output: Contribution to conference › Paper › peer-review

6 Citations (Scopus)

86 Downloads (Pure)

Abstract

We present the characterization of a novel design for a varifocal MEMS mirror with piezoelectric actuation and defocus movement up to 100 kHz. The device was simulated using a finite-element method, fabricated using a multi-user silicon-oninsulator process, and its mechanical response to piezoelectric actuation evaluated through laser vibrometry and a dynamic white-light interferometer.

Original language	English
Number of pages	2
Publication status	Published - 29 Jul 2018
Event	Conference on Optical MEMS and Nanophotonics 2018 - Ecole Polyechnique Fédérale de Lausanne, Lausanne, Switzerland Duration: 29 Jul 2018 → 2 Aug 2018 https://omn2018.epfl.ch/

Conference

Conference	Conference on Optical MEMS and Nanophotonics 2018
Abbreviated title	OMN 2018
Country/Territory	Switzerland
City	Lausanne
Period	29/07/18 → 2/08/18
Internet address	https://omn2018.epfl.ch/

Keywords

optical MEMS
piezoelectric
varifocal mirror
high frequency

Access to Document

Janin-etal-2018-Characterization-of-a-fast-piezoelectric-varifocal-MEMS-mirrorAccepted author manuscript, 720 KB

6 Citations
1 Abstract

Fast piezoelectric scanning MEMS mirror for 1D ion adressing
Janin, P., Bauer, R., Griffin, P., Riis, E. & Uttamchandani, D., 9 Dec 2019. 2 p.
Research output: Contribution to conference › Abstract › peer-review

Open Access
File
3 Citations (Scopus)

71 Downloads (Pure)

1 Participation in conference

Conference on Optical MEMS and Nanophotonics 2018
Ralf Bauer (Participant)
29 Jul 2018 → 2 Aug 2018
Activity: Participating in or organising an event types › Participation in conference

Cite this

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title = "Characterization of a fast piezoelectric varifocal MEMS mirror",

abstract = "We present the characterization of a novel design for a varifocal MEMS mirror with piezoelectric actuation and defocus movement up to 100 kHz. The device was simulated using a finite-element method, fabricated using a multi-user silicon-oninsulator process, and its mechanical response to piezoelectric actuation evaluated through laser vibrometry and a dynamic white-light interferometer.",

keywords = "optical MEMS, piezoelectric, varifocal mirror, high frequency",

author = "Paul Janin and Ralf Bauer and Paul Griffin and Erling Riis and Deepak Uttamchandani",

year = "2018",

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T1 - Characterization of a fast piezoelectric varifocal MEMS mirror

AU - Janin, Paul

AU - Bauer, Ralf

AU - Griffin, Paul

AU - Riis, Erling

AU - Uttamchandani, Deepak

PY - 2018/7/29

Y1 - 2018/7/29

N2 - We present the characterization of a novel design for a varifocal MEMS mirror with piezoelectric actuation and defocus movement up to 100 kHz. The device was simulated using a finite-element method, fabricated using a multi-user silicon-oninsulator process, and its mechanical response to piezoelectric actuation evaluated through laser vibrometry and a dynamic white-light interferometer.

AB - We present the characterization of a novel design for a varifocal MEMS mirror with piezoelectric actuation and defocus movement up to 100 kHz. The device was simulated using a finite-element method, fabricated using a multi-user silicon-oninsulator process, and its mechanical response to piezoelectric actuation evaluated through laser vibrometry and a dynamic white-light interferometer.

KW - optical MEMS

KW - piezoelectric

KW - varifocal mirror

KW - high frequency

M3 - Paper

T2 - Conference on Optical MEMS and Nanophotonics 2018

Y2 - 29 July 2018 through 2 August 2018

ER -

Characterization of a fast piezoelectric varifocal MEMS mirror

Abstract

Conference

Keywords

Access to Document

Fingerprint

Research output

Fast piezoelectric scanning MEMS mirror for 1D ion adressing

Activities

Conference on Optical MEMS and Nanophotonics 2018

Cite this