X-ray Reciprocal Space Mapping (RSM) is a powerful tool to explore the structure of semiconductor materials. However, conventional lab-based RSMs are usually measured in two dimensions (2D) ignoring the third dimension of diffraction-space volume. We report the use of a combination of X-ray microfocusing and state-of-the-art 2D area detectors to study the full volume of diffraction–space while probing III-nitride materials on the microscale.
- X-ray microdiffraction
- eciprocal space mapping
- synchrotron radiation
- nitride materials
Kachkanov, V., Dobnya, I., O'Donnell, K., Lorenz, K., Pereira, S. M. D. S., Watson, I., ... Parbrook, P. (2013). Characterisation of III-nitride materials by synchrotron X-ray microdiffraction reciprocal space mapping. Physica Status Solidi C, 10(3), 481-485. https://doi.org/10.1002/pssc.201200596