Characterisation of a nanostepper driven optical shutter for application in free-space microoptics

J. Zawadzka, L. Li, D.G. Uttamchandani

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A vertically self-assembled, fibre optic variable optical attenuator (VOA) incorporating a microshutter placed between the end faces of two closely spaced optical fibres is reported. The position of the microshutter with respect to the optical fibre end face was controlled by a nanostepping MEMS motor that was composed of a microactuator array and microsprings. Optical and mechanical tests were performed on the device. It was found that it is possible to obtain a 45 dB dynamic range with an attenuation time of 36 ms. A model of the microshutter was constructed as a plane plate structure with evenly distributed etch holes that are artefacts of the manufacturing process. Geometric and diffraction image analyses were performed and the attenuation characteristic of the system was assessed. It is thus shown that using commercially accessible foundries it is possible to fabricate a high precision VOA for free-space microoptics applications.
LanguageEnglish
Pages61-66
Number of pages6
JournalIEE Proceedings Science Measurement and Technology
Volume151
Issue number2
DOIs
Publication statusPublished - 3 Mar 2004

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Optical shutters
Microoptics
Optical fibers
Microactuators
Foundries
Fiber optics
MEMS
Diffraction

Keywords

  • geometrical optics
  • micro-optics
  • microactuators
  • optical attenuators
  • optical fibre losses
  • optical fibres
  • stepping motors

Cite this

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abstract = "A vertically self-assembled, fibre optic variable optical attenuator (VOA) incorporating a microshutter placed between the end faces of two closely spaced optical fibres is reported. The position of the microshutter with respect to the optical fibre end face was controlled by a nanostepping MEMS motor that was composed of a microactuator array and microsprings. Optical and mechanical tests were performed on the device. It was found that it is possible to obtain a 45 dB dynamic range with an attenuation time of 36 ms. A model of the microshutter was constructed as a plane plate structure with evenly distributed etch holes that are artefacts of the manufacturing process. Geometric and diffraction image analyses were performed and the attenuation characteristic of the system was assessed. It is thus shown that using commercially accessible foundries it is possible to fabricate a high precision VOA for free-space microoptics applications.",
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Characterisation of a nanostepper driven optical shutter for application in free-space microoptics. / Zawadzka, J.; Li, L.; Uttamchandani, D.G.

In: IEE Proceedings Science Measurement and Technology , Vol. 151, No. 2, 03.03.2004, p. 61-66.

Research output: Contribution to journalArticle

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KW - optical fibre losses

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