Projects per year
Abstract
We give an overview of the use of cathodoluminescence (CL) in scanning electron microscopy (SEM) for the nano-scale characterization of semiconducting materials and devices. We discuss the technical aspects of the measurement, such as factors limiting the spatial resolution and design considerations for efficient collection optics. The advantages of more recent developments in the technique are outlined, including the use of the hyperspectral imaging mode and the combination of CL and other SEM-based measurements. We illustrate these points with examples from our own experience of designing and constructing CL systems and applying the technique to the characterization of III-nitride materials and nanostructures.
Original language | English |
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Article number | 064005 |
Number of pages | 8 |
Journal | Semiconductor Science and Technology |
Volume | 26 |
Issue number | 6 |
Early online date | 29 Mar 2011 |
DOIs | |
Publication status | Published - 30 Jun 2011 |
Keywords
- optics
- condensed matter
- electrical matter
- thin films
- cathodoluminescence
Fingerprint
Dive into the research topics of 'Cathodoluminescence nano-characterization of semiconductors'. Together they form a unique fingerprint.Projects
- 4 Finished
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Gallium nitride enabled hybrid and flexible photonics
Dawson, M., Calvez, S., Gu, E., Martin, R., Skabara, P. & Watson, I.
EPSRC (Engineering and Physical Sciences Research Council)
1/04/11 → 31/03/15
Project: Research
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Lighting the future
Martin, R. & Skabara, P.
EPSRC (Engineering and Physical Sciences Research Council)
1/12/10 → 30/11/15
Project: Research
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Ultra Energy Efficient III-nitride/polymer hybrid white light-emitting-diodes using nanotechnology
Martin, R. & Skabara, P.
EPSRC (Engineering and Physical Sciences Research Council)
1/03/10 → 31/08/13
Project: Research
Research output
- 72 Citations
- 1 Comment/debate
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Corrigendum: Cathodoluminescence nano-characterization of semiconductors (2011 Semicond. Sci. Technol. 26 064005)
Edwards, P. R. & Martin, R. W., 6 Jun 2018, In: Semiconductor Science and Technology. 33, 1 p., 079501.Research output: Contribution to journal › Comment/debate › peer-review
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