Biomimetic MEMS directional microphone structures for multi-band operation

Yansheng Zhang; James F.C. Windmill; Deepak Uttamchandani

doi:10.1109/ICSENS.2014.6985029

Biomimetic MEMS directional microphone structures for multi-band operation

Yansheng Zhang, James F.C. Windmill, Deepak Uttamchandani

Electronic And Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

14 Citations (Scopus)

189 Downloads (Pure)

Abstract

Researchers have developed a variety of micro-electromechinical systems (MEMS) directional microphones inspired by the behavior of the hearing organ of the parasitoid fly Ormia ochracea. Ormia's hearing organ can detect a sound's direction as accurately as the human auditory system despite its small overall size of less than 1mm. This remarkable capability has led to in-depth studies of its mechanics which, in turn, have led to the practical realization of several MEMS based directional acoustic sensors. The majority of earlier designs were limited to one frequency band and have relatively complicated structures for manufacture. A new MEMS microphone design described in this paper expands the simultaneous working frequency bands and reduces the cost of device fabrication without significantly increasing overall dimensions.

Original language	English
Title of host publication	IEEE Sensors 2014
Subtitle of host publication	Proceedings
Place of Publication	Piscataway, NJ.
Publisher	IEEE
Pages	440-443
Number of pages	4
ISBN (Print)	9781479901616
DOIs	https://doi.org/10.1109/ICSENS.2014.6985029
Publication status	Published - 2014
Event	IEEE SENSORS 2014 Session Chair "Temperature and Humidity Sensors" - Valencia Conference Centre, Valencia, Spain Duration: 2 Nov 2014 → 5 Nov 2014

Conference

Conference	IEEE SENSORS 2014 Session Chair "Temperature and Humidity Sensors"
Country/Territory	Spain
City	Valencia
Period	2/11/14 → 5/11/14

Keywords

acoustic transducers
biomimetics
hearing
microphones
microsensors
auditory system
azimuth
couplings
fabrication
micromechanical devices
resonant frequency
ormia ochracea
directional microphone
multi-bands
biological inspired
MEMS

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10.1109/ICSENS.2014.6985029

Zhang-etal-Sensors2014-biomimetic-MEMS-directional-microphone-structuresAccepted author manuscript, 608 KB

Cite this

@inproceedings{f86c742f73b541c48dc79828a96e0740,

title = "Biomimetic MEMS directional microphone structures for multi-band operation",

abstract = "Researchers have developed a variety of micro-electromechinical systems (MEMS) directional microphones inspired by the behavior of the hearing organ of the parasitoid fly Ormia ochracea. Ormia's hearing organ can detect a sound's direction as accurately as the human auditory system despite its small overall size of less than 1mm. This remarkable capability has led to in-depth studies of its mechanics which, in turn, have led to the practical realization of several MEMS based directional acoustic sensors. The majority of earlier designs were limited to one frequency band and have relatively complicated structures for manufacture. A new MEMS microphone design described in this paper expands the simultaneous working frequency bands and reduces the cost of device fabrication without significantly increasing overall dimensions.",

keywords = "acoustic transducers, biomimetics, hearing, microphones, microsensors, auditory system, azimuth, couplings, fabrication, micromechanical devices, resonant frequency, ormia ochracea, directional microphone, multi-bands, biological inspired, MEMS",

author = "Yansheng Zhang and Windmill, \{James F.C.\} and Deepak Uttamchandani",

note = "{\textcopyright}2014 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.; IEEE SENSORS 2014 Session Chair {"}Temperature and Humidity Sensors{"} ; Conference date: 02-11-2014 Through 05-11-2014",

year = "2014",

doi = "10.1109/ICSENS.2014.6985029",

language = "English",

isbn = "9781479901616",

pages = "440--443",

booktitle = "IEEE Sensors 2014",

publisher = "IEEE",

}

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T1 - Biomimetic MEMS directional microphone structures for multi-band operation

AU - Zhang, Yansheng

AU - Windmill, James F.C.

AU - Uttamchandani, Deepak

N1 - ©2014 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2014

Y1 - 2014

N2 - Researchers have developed a variety of micro-electromechinical systems (MEMS) directional microphones inspired by the behavior of the hearing organ of the parasitoid fly Ormia ochracea. Ormia's hearing organ can detect a sound's direction as accurately as the human auditory system despite its small overall size of less than 1mm. This remarkable capability has led to in-depth studies of its mechanics which, in turn, have led to the practical realization of several MEMS based directional acoustic sensors. The majority of earlier designs were limited to one frequency band and have relatively complicated structures for manufacture. A new MEMS microphone design described in this paper expands the simultaneous working frequency bands and reduces the cost of device fabrication without significantly increasing overall dimensions.

AB - Researchers have developed a variety of micro-electromechinical systems (MEMS) directional microphones inspired by the behavior of the hearing organ of the parasitoid fly Ormia ochracea. Ormia's hearing organ can detect a sound's direction as accurately as the human auditory system despite its small overall size of less than 1mm. This remarkable capability has led to in-depth studies of its mechanics which, in turn, have led to the practical realization of several MEMS based directional acoustic sensors. The majority of earlier designs were limited to one frequency band and have relatively complicated structures for manufacture. A new MEMS microphone design described in this paper expands the simultaneous working frequency bands and reduces the cost of device fabrication without significantly increasing overall dimensions.

KW - acoustic transducers

KW - biomimetics

KW - hearing

KW - microphones

KW - microsensors

KW - auditory system

KW - azimuth

KW - couplings

KW - fabrication

KW - micromechanical devices

KW - resonant frequency

KW - ormia ochracea

KW - directional microphone

KW - multi-bands

KW - biological inspired

KW - MEMS

UR - http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=6971895

UR - http://ieee-sensors2014.org/

U2 - 10.1109/ICSENS.2014.6985029

DO - 10.1109/ICSENS.2014.6985029

M3 - Conference contribution book

SN - 9781479901616

SP - 440

EP - 443

BT - IEEE Sensors 2014

PB - IEEE

CY - Piscataway, NJ.

T2 - IEEE SENSORS 2014 Session Chair "Temperature and Humidity Sensors"

Y2 - 2 November 2014 through 5 November 2014

ER -

Biomimetic MEMS directional microphone structures for multi-band operation

Abstract

Conference

Keywords

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A MEMS microphone inspired by Ormia for spatial sound detection

Development of a biologically inspired MEMS microphone

New ormia-inspired directional MEMS microphone operating in a low frequency band

Cite this