Biomimetic MEMS directional microphone structures for multi-band operation

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

7 Citations (Scopus)
158 Downloads (Pure)

Abstract

Researchers have developed a variety of micro-electromechinical systems (MEMS) directional microphones inspired by the behavior of the hearing organ of the parasitoid fly Ormia ochracea. Ormia's hearing organ can detect a sound's direction as accurately as the human auditory system despite its small overall size of less than 1mm. This remarkable capability has led to in-depth studies of its mechanics which, in turn, have led to the practical realization of several MEMS based directional acoustic sensors. The majority of earlier designs were limited to one frequency band and have relatively complicated structures for manufacture. A new MEMS microphone design described in this paper expands the simultaneous working frequency bands and reduces the cost of device fabrication without significantly increasing overall dimensions.
Original languageEnglish
Title of host publicationIEEE Sensors 2014
Subtitle of host publicationProceedings
Place of PublicationPiscataway, NJ.
PublisherIEEE
Pages440-443
Number of pages4
ISBN (Print)9781479901616
DOIs
Publication statusPublished - 2014
EventIEEE SENSORS 2014 Session Chair "Temperature and Humidity Sensors" - Valencia Conference Centre, Valencia, Spain
Duration: 2 Nov 20145 Nov 2014

Conference

ConferenceIEEE SENSORS 2014 Session Chair "Temperature and Humidity Sensors"
CountrySpain
CityValencia
Period2/11/145/11/14

    Fingerprint

Keywords

  • acoustic transducers
  • biomimetics
  • hearing
  • microphones
  • microsensors
  • auditory system
  • azimuth
  • couplings
  • fabrication
  • micromechanical devices
  • resonant frequency
  • ormia ochracea
  • directional microphone
  • multi-bands
  • biological inspired
  • MEMS

Cite this