Abstract
Using the methods of photoresist reflow and moulding, bifocal and negative microlens arrays, with diameters down to 10 μm, have been fabricated in GaN-on-sapphire. The optical properties of these microlens arrays were characterised by a recently developed reflection/transmission confocal microscopy technique and agree well with calculated values.
| Original language | English |
|---|---|
| Title of host publication | Lasers and Electro-Optics Society, 2004. LEOS 2004 |
| Publisher | IEEE |
| Pages | 360-361 |
| Number of pages | 1 |
| Volume | 1 |
| ISBN (Print) | 9780780385573 |
| DOIs | |
| Publication status | Published - 11 Nov 2004 |
Keywords
- gallium compounds
- microlenses
- moulding
- optical arrays
- optical fabrication
- optical materials
- photoresists
- wide band gap semiconductors