Abstract
Using the methods of photoresist reflow and moulding, bifocal and negative microlens arrays, with diameters down to 10 μm, have been fabricated in GaN-on-sapphire. The optical properties of these microlens arrays were characterised by a recently developed reflection/transmission confocal microscopy technique and agree well with calculated values.
Original language | English |
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Title of host publication | Lasers and Electro-Optics Society, 2004. LEOS 2004 |
Publisher | IEEE |
Pages | 360-361 |
Number of pages | 1 |
Volume | 1 |
ISBN (Print) | 9780780385573 |
DOIs | |
Publication status | Published - 11 Nov 2004 |
Keywords
- gallium compounds
- microlenses
- moulding
- optical arrays
- optical fabrication
- optical materials
- photoresists
- wide band gap semiconductors