Automated alignment in mask-free photolithography enabled by micro-LED arrays

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)
46 Downloads (Pure)


We present an automated control system for positioning on the micro scale, based on the principles of single pixel imaging and fluorescence. By using the projected output of a chequerboard array of CMOS controllable μ-LEDs at a suitable wavelength, we are able to spatially locate, track and automatically align to fluorescent markers. Using this system, positioning is demonstrated with accuracy on the order of 20 μm. We present a maskless photo-lithography system using the automated control capability and a second μ-LED array to photo-cure customisable structures in photoresist with alignment referenced to the fluorescent markers.
Original languageEnglish
Pages (from-to)721-723
Number of pages3
JournalElectronics Letters
Issue number19
Early online date31 May 2021
Publication statusE-pub ahead of print - 31 May 2021


  • automated
  • alignment
  • mask-free photolithography
  • micro-LED arrays


Dive into the research topics of 'Automated alignment in mask-free photolithography enabled by micro-LED arrays'. Together they form a unique fingerprint.

Cite this