Abstract
We present an automated control system for positioning on the micro scale, based on the principles of single pixel imaging and fluorescence. By using the projected output of a chequerboard array of CMOS controllable μ-LEDs at a suitable wavelength, we are able to spatially locate, track and automatically align to fluorescent markers. Using this system, positioning is demonstrated with accuracy on the order of 20 μm. We present a maskless photo-lithography system using the automated control capability and a second μ-LED array to photo-cure customisable structures in photoresist with alignment referenced to the fluorescent markers.
Original language | English |
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Pages (from-to) | 721-723 |
Number of pages | 3 |
Journal | Electronics Letters |
Volume | 57 |
Issue number | 19 |
Early online date | 31 May 2021 |
DOIs | |
Publication status | E-pub ahead of print - 31 May 2021 |
Keywords
- automated
- alignment
- mask-free photolithography
- micro-LED arrays
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Data for: "Automated Alignment in Mask-Free Photolithography Enabled by Micro-LED Arrays"
Blanchard, A. (Owner), Stonehouse, M. (Creator), Watson, I. (Contributor), Herrnsdorf, J. (Supervisor), Dawson, M. (Supervisor), Gu, E. (Supervisor), Guilhabert, B. J. E. (Contributor) & Zhang, Y. (Creator), University of Strathclyde, 24 May 2021
DOI: 10.15129/8001a316-d1e8-4158-b90b-d24193f41535
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