Abstract
Paper discussing atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition.
| Original language | English |
|---|---|
| Pages (from-to) | 657-660 |
| Number of pages | 3 |
| Journal | Institute of Physics Conference Series |
| Volume | 180 |
| Publication status | Published - 2003 |
Keywords
- atomic force
- microscopy
- inGaN
- chemical vapour deposition
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Liu, C., Deatcher, C. J., Cheong, M. G., & Watson, I. M. (2003). Atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition. Institute of Physics Conference Series, 180, 657-660.