Abstract
Paper discussing atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition.
Original language | English |
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Pages (from-to) | 657-660 |
Number of pages | 3 |
Journal | Institute of Physics Conference Series |
Volume | 180 |
Publication status | Published - 2003 |
Keywords
- atomic force
- microscopy
- inGaN
- chemical vapour deposition