Atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition

C. Liu, C.J. Deatcher, M.G. Cheong, I.M. Watson

Research output: Contribution to journal › Article

Abstract

Paper discussing atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition.
LanguageEnglish
Pages657-660
Number of pages3
JournalInstitute of Physics Conference Series
Volume180
Publication statusPublished - 2003

Fingerprint

metalorganic chemical vapor deposition
atomic force microscopy

Keywords

  • atomic force
  • microscopy
  • inGaN
  • chemical vapour deposition

Cite this

Liu, C. ; Deatcher, C.J. ; Cheong, M.G. ; Watson, I.M. / Atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition. In: Institute of Physics Conference Series. 2003 ; Vol. 180. pp. 657-660.
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title = "Atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition",
abstract = "Paper discussing atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition.",
keywords = "atomic force, microscopy, inGaN, chemical vapour deposition",
author = "C. Liu and C.J. Deatcher and M.G. Cheong and I.M. Watson",
year = "2003",
language = "English",
volume = "180",
pages = "657--660",
journal = "Institute of Physics Conference Series",
issn = "0951-3248",
publisher = "IOP Publishing Ltd.",

}

Liu, C, Deatcher, CJ, Cheong, MG & Watson, IM 2003, 'Atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition' Institute of Physics Conference Series, vol. 180, pp. 657-660.

Atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition. / Liu, C.; Deatcher, C.J.; Cheong, M.G.; Watson, I.M.

In: Institute of Physics Conference Series, Vol. 180, 2003, p. 657-660.

Research output: Contribution to journal › Article

TY - JOUR

T1 - Atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition

AU - Liu, C.

AU - Deatcher, C.J.

AU - Cheong, M.G.

AU - Watson, I.M.

PY - 2003

Y1 - 2003

N2 - Paper discussing atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition.

AB - Paper discussing atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition.

KW - atomic force

KW - microscopy

KW - inGaN

KW - chemical vapour deposition

M3 - Article

VL - 180

SP - 657

EP - 660

JO - Institute of Physics Conference Series

T2 - Institute of Physics Conference Series

JF - Institute of Physics Conference Series

SN - 0951-3248

ER -

Liu C, Deatcher CJ, Cheong MG, Watson IM. Atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition. Institute of Physics Conference Series. 2003;180:657-660.