Atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition

C. Liu, C.J. Deatcher, M.G. Cheong, I.M. Watson

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

Paper discussing atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition.
Original languageEnglish
Pages (from-to)657-660
Number of pages3
JournalInstitute of Physics Conference Series
Volume180
Publication statusPublished - 2003

Keywords

  • atomic force
  • microscopy
  • inGaN
  • chemical vapour deposition

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