Atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition

C. Liu, C.J. Deatcher, M.G. Cheong, I.M. Watson

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17 Citations (Scopus)

Abstract

Paper discussing atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition.

Original language	English
Pages (from-to)	657-660
Number of pages	3
Journal	Institute of Physics Conference Series
Volume	180
Publication status	Published - 2003

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title = "Atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition",

abstract = "Paper discussing atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition.",

keywords = "atomic force, microscopy, inGaN, chemical vapour deposition",

author = "C. Liu and C.J. Deatcher and M.G. Cheong and I.M. Watson",

year = "2003",

language = "English",

volume = "180",

pages = "657--660",

journal = "Institute of Physics Conference Series",

issn = "0951-3248",

publisher = "IOP Publishing Ltd.",

}

TY - JOUR

T1 - Atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition

AU - Liu, C.

AU - Deatcher, C.J.

AU - Cheong, M.G.

AU - Watson, I.M.

PY - 2003

Y1 - 2003

N2 - Paper discussing atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition.

AB - Paper discussing atomic force microscopy of inGaN-based structures grown by metal-organic chemical vapour deposition.

KW - atomic force

KW - microscopy

KW - inGaN

KW - chemical vapour deposition

M3 - Article

VL - 180

SP - 657

EP - 660

JO - Institute of Physics Conference Series

JF - Institute of Physics Conference Series

SN - 0951-3248

ER -