Abstract
In this paper, we report on the fabrication of Mo-oxide nanostructures and nanoarchitectures using an atmospheric-microplasma (AMP) system. This AMP system shows a high degree of flexibility and is capable of producing several different nanostructures and nanoarchitectures by varying the process parameters. The low-cost and simplicity of the process are important characteristics for nanomanufacturing, and AMPs offer such advantages. In addition, AMPs have shown the ability of promoting self-organization of nanostructures.
| Original language | English |
|---|---|
| Pages (from-to) | 1027-1033 |
| Number of pages | 7 |
| Journal | IEEE Transactions on Plasma Science |
| Volume | 37 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 30 Jun 2009 |
| Externally published | Yes |
Funding
Manuscript received November 30, 2008; revised January 13, 2009. First published March 4, 2009; current version published June 10, 2009. This work was supported in part by the National Science Foundation (USA) under Award EEC-0530575, by the Australian Research Council, CSIRO, and by the International Research Network for Deterministic Plasma-Aided Nanofabrication.
Keywords
- atmospheric microplasma (AMP)
- metal-oxide
- molybdenum
- nanofabrication
- nanomanufacturing