Application of MEMS enabled excitation and detection schemes to PA imaging

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

Abstract

This paper shows, for the first time, a MEMS enabled photoacoustic system, using a custom MEMS Q-switched Nd:YAG laser for generation of photoacoustic (PA) waves and a custom-built MEMS thin-film aluminium nitride piezoelectric micromachined ultrasound transducers for PA wave detection.
LanguageEnglish
Title of host publicationTransducers 2019
Subtitle of host publicationThe 20th International Conference on Solid-State Sensors, Actuators and Microsystems
Place of PublicationPiscataway, NJ.
PublisherIEEE
Number of pages4
Publication statusAccepted/In press - 21 Feb 2019
EventTransducers 2019 - The 20th International Conference on Solid-State Sensors, Actuators and Microsystems - Berlin, Germany
Duration: 23 Jun 201927 Jun 2019

Conference

ConferenceTransducers 2019 - The 20th International Conference on Solid-State Sensors, Actuators and Microsystems
Abbreviated titleTransducers 2019
CountryGermany
CityBerlin
Period23/06/1927/06/19

Fingerprint

Photoacoustic effect
MEMS
Imaging techniques
Aluminum nitride
Transducers
Ultrasonics
Thin films
Lasers

Keywords

  • photoacoustic imaging
  • MEMS
  • piezoelectric micromachined ultrasound transducers
  • aluminium nitride

Cite this

Kusch, J., Flockhart, G., Bauer, R., & Uttamchandani, D. (Accepted/In press). Application of MEMS enabled excitation and detection schemes to PA imaging. In Transducers 2019: The 20th International Conference on Solid-State Sensors, Actuators and Microsystems Piscataway, NJ.: IEEE.
Kusch, Jonas ; Flockhart, Gordon ; Bauer, Ralf ; Uttamchandani, Deepak. / Application of MEMS enabled excitation and detection schemes to PA imaging. Transducers 2019: The 20th International Conference on Solid-State Sensors, Actuators and Microsystems. Piscataway, NJ. : IEEE, 2019.
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title = "Application of MEMS enabled excitation and detection schemes to PA imaging",
abstract = "This paper shows, for the first time, a MEMS enabled photoacoustic system, using a custom MEMS Q-switched Nd:YAG laser for generation of photoacoustic (PA) waves and a custom-built MEMS thin-film aluminium nitride piezoelectric micromachined ultrasound transducers for PA wave detection.",
keywords = "photoacoustic imaging, MEMS, piezoelectric micromachined ultrasound transducers, aluminium nitride",
author = "Jonas Kusch and Gordon Flockhart and Ralf Bauer and Deepak Uttamchandani",
year = "2019",
month = "2",
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Kusch, J, Flockhart, G, Bauer, R & Uttamchandani, D 2019, Application of MEMS enabled excitation and detection schemes to PA imaging. in Transducers 2019: The 20th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, Piscataway, NJ., Transducers 2019 - The 20th International Conference on Solid-State Sensors, Actuators and Microsystems, Berlin, Germany, 23/06/19.

Application of MEMS enabled excitation and detection schemes to PA imaging. / Kusch, Jonas; Flockhart, Gordon; Bauer, Ralf; Uttamchandani, Deepak.

Transducers 2019: The 20th International Conference on Solid-State Sensors, Actuators and Microsystems. Piscataway, NJ. : IEEE, 2019.

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

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Kusch J, Flockhart G, Bauer R, Uttamchandani D. Application of MEMS enabled excitation and detection schemes to PA imaging. In Transducers 2019: The 20th International Conference on Solid-State Sensors, Actuators and Microsystems. Piscataway, NJ.: IEEE. 2019