Application of MEMS enabled excitation and detection schemes to photoacoustic imaging

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Abstract

This paper shows, for the first time, a MEMS enabled photoacoustic system, using a custom MEMS Q-switched Nd:YAG laser for generation of photoacoustic (PA) waves and a custom-built MEMS thin-film aluminium nitride piezoelectric micromachined ultrasound transducers for PA wave detection.
Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Place of PublicationPiscataway, NJ.
PublisherIEEE
Pages829-832
Number of pages4
ISBN (Electronic)9781538681046
ISBN (Print)9781538681053
DOIs
Publication statusPublished - 22 Aug 2019
EventTransducers 2019 - The 20th International Conference on Solid-State Sensors, Actuators and Microsystems - Berlin, Germany
Duration: 23 Jun 201927 Jun 2019

Conference

ConferenceTransducers 2019 - The 20th International Conference on Solid-State Sensors, Actuators and Microsystems
Abbreviated titleTransducers 2019
CountryGermany
CityBerlin
Period23/06/1927/06/19

Keywords

  • photoacoustic imaging
  • MEMS
  • piezoelectric micromachined ultrasound transducers
  • aluminium nitride

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  • Cite this

    Kusch, J., Flockhart, G., Bauer, R., & Uttamchandani, D. (2019). Application of MEMS enabled excitation and detection schemes to photoacoustic imaging. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (pp. 829-832). IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808339