Application of MEMS enabled excitation and detection schemes to photoacoustic imaging

Jonas Kusch; Gordon Flockhart; Ralf Bauer; Deepak Uttamchandani

doi:10.1109/TRANSDUCERS.2019.8808339

Application of MEMS enabled excitation and detection schemes to photoacoustic imaging

Jonas Kusch, Gordon Flockhart, Ralf Bauer, Deepak Uttamchandani

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

32 Downloads (Pure)

Abstract

This paper shows, for the first time, a MEMS enabled photoacoustic system, using a custom MEMS Q-switched Nd:YAG laser for generation of photoacoustic (PA) waves and a custom-built MEMS thin-film aluminium nitride piezoelectric micromachined ultrasound transducers for PA wave detection.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Place of Publication	Piscataway, NJ.
Publisher	IEEE
Pages	829-832
Number of pages	4
ISBN (Electronic)	9781538681046
ISBN (Print)	9781538681053
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808339
Publication status	Published - 22 Aug 2019
Event	Transducers 2019 - The 20th International Conference on Solid-State Sensors, Actuators and Microsystems - Berlin, Germany Duration: 23 Jun 2019 → 27 Jun 2019

Conference

Conference	Transducers 2019 - The 20th International Conference on Solid-State Sensors, Actuators and Microsystems
Abbreviated title	Transducers 2019
Country/Territory	Germany
City	Berlin
Period	23/06/19 → 27/06/19

Keywords

photoacoustic imaging
MEMS
piezoelectric micromachined ultrasound transducers
aluminium nitride

Access to Document

10.1109/TRANSDUCERS.2019.8808339

Kusch-etal-Transducers2019-Application-MEMS-enabled-excitation-detection_schemes-photoacoustic-imagingAccepted author manuscript, 2.49 MB

Cite this

@inproceedings{b98f6c762f7d4582a88f55f9c8c166fa,

title = "Application of MEMS enabled excitation and detection schemes to photoacoustic imaging",

abstract = "This paper shows, for the first time, a MEMS enabled photoacoustic system, using a custom MEMS Q-switched Nd:YAG laser for generation of photoacoustic (PA) waves and a custom-built MEMS thin-film aluminium nitride piezoelectric micromachined ultrasound transducers for PA wave detection.",

keywords = "photoacoustic imaging, MEMS, piezoelectric micromachined ultrasound transducers, aluminium nitride",

author = "Jonas Kusch and Gordon Flockhart and Ralf Bauer and Deepak Uttamchandani",

note = "{\textcopyright} 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.; Transducers 2019 - The 20th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2019 ; Conference date: 23-06-2019 Through 27-06-2019",

year = "2019",

month = aug,

day = "22",

doi = "10.1109/TRANSDUCERS.2019.8808339",

language = "English",

isbn = "9781538681053",

pages = "829--832",

booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)",

publisher = "IEEE",

}

Kusch, J, Flockhart, G , Bauer, R & Uttamchandani, D 2019, Application of MEMS enabled excitation and detection schemes to photoacoustic imaging. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). IEEE, Piscataway, NJ., pp. 829-832, Transducers 2019 - The 20th International Conference on Solid-State Sensors, Actuators and Microsystems, Berlin, Berlin, Germany, 23/06/19. https://doi.org/10.1109/TRANSDUCERS.2019.8808339

Application of MEMS enabled excitation and detection schemes to photoacoustic imaging. / Kusch, Jonas; Flockhart, Gordon ; Bauer, Ralf et al.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). Piscataway, NJ.: IEEE, 2019. p. 829-832.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

TY - GEN

T1 - Application of MEMS enabled excitation and detection schemes to photoacoustic imaging

AU - Kusch, Jonas

AU - Flockhart, Gordon

AU - Bauer, Ralf

AU - Uttamchandani, Deepak

N1 - © 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2019/8/22

Y1 - 2019/8/22

N2 - This paper shows, for the first time, a MEMS enabled photoacoustic system, using a custom MEMS Q-switched Nd:YAG laser for generation of photoacoustic (PA) waves and a custom-built MEMS thin-film aluminium nitride piezoelectric micromachined ultrasound transducers for PA wave detection.

AB - This paper shows, for the first time, a MEMS enabled photoacoustic system, using a custom MEMS Q-switched Nd:YAG laser for generation of photoacoustic (PA) waves and a custom-built MEMS thin-film aluminium nitride piezoelectric micromachined ultrasound transducers for PA wave detection.

KW - photoacoustic imaging

KW - MEMS

KW - piezoelectric micromachined ultrasound transducers

KW - aluminium nitride

U2 - 10.1109/TRANSDUCERS.2019.8808339

DO - 10.1109/TRANSDUCERS.2019.8808339

M3 - Conference contribution book

SN - 9781538681053

SP - 829

EP - 832

BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

PB - IEEE

CY - Piscataway, NJ.

T2 - Transducers 2019 - The 20th International Conference on Solid-State Sensors, Actuators and Microsystems

Y2 - 23 June 2019 through 27 June 2019

ER -

Application of MEMS enabled excitation and detection schemes to photoacoustic imaging

Abstract

Conference

Keywords

Access to Document

Fingerprint

Cite this