Analysis of microsprings for calculating the force produced by microactuators

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Abstract

We present models of two types of microsprings namely box-spring and zig-zag spring that can be used to measure the force generated by microactuators. The
spring constant for both springs is calculated by FEM using ANSYS software. In these models, the effects of short beams that act as connectors in the spring structures are considered and analyzed by changing their width. Also, from the results, we find that the box spring appears more balanced than the zig-zag spring when the force is applied in the single central direction. A series of SDAs with box spring have been fabricated and forces ofthose SDAs have been calculated.
Original languageEnglish
Title of host publicationProceedings of SPIE
Subtitle of host publicationDesign, Test, Integration, and Packaging of MEMS/MOEMS 2002
Pages394-402
Number of pages9
Volume4755
DOIs
Publication statusPublished - 2002

Keywords

  • microsprings
  • microactuator
  • zig-zag spring
  • box spring

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    Li, L., & Uttamchandani, D. G. (2002). Analysis of microsprings for calculating the force produced by microactuators. In Proceedings of SPIE: Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 (Vol. 4755, pp. 394-402) https://doi.org/10.1117/12.462836