Engineering
Angular Dependence
10%
Demonstrates
10%
Determines
10%
Error
10%
Experiments
10%
Fabrication
100%
Focused Ion Beam
100%
Form Accuracy
10%
Level Set Method
10%
Machining
20%
Machining Parameter
10%
Models
20%
Nanofabrication Process
100%
Nanoscale
10%
Redeposition
100%
Significant Contribution
10%
Silicon Substrate
10%
Simulation
20%
Simulation Method
10%
Simulation Program
30%
Simulation Result
10%
Surface Topography
10%
Surfaces
20%
Physics
Atoms
10%
Fabrication
100%
Ion Beams
100%
Machining
30%
Model
20%
Monte Carlo
10%
Nanofabrication
20%
Nanoscale
10%
Parameter
10%
Quantum Dot
100%
Shapes
10%
Silicon
10%
Simulation
70%
Substrates
10%
Chemistry
Atom
10%
Concentration
10%
Error
10%
Ion Beam
100%
Machining
30%
Monte Carlo Method
10%
Nanodots
100%
Reaction Yield
10%
Silicon
20%
Simulation
60%
Surface
40%
Topography
10%
Material Science
Focused Ion Beam
100%
Machining
30%
Surface Topography
10%