An investigation of redeposition effect for deterministic fabrication of nanodots by Focused Ion Beam

J. Sun, Xichun Luo, J. M. Ritchie, W. Chang, W. Wang

Research output: Contribution to journalArticle

11 Citations (Scopus)

Fingerprint Dive into the research topics of 'An investigation of redeposition effect for deterministic fabrication of nanodots by Focused Ion Beam'. Together they form a unique fingerprint.

Engineering & Materials Science