An investigation of redeposition effect for deterministic fabrication of nanodots by Focused Ion Beam

J. Sun, Xichun Luo, J. M. Ritchie, W. Chang, W. Wang

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Focused ion beam machining is a powerful technique for micro/nanofabrication. However its machined surface form accuracy will be degrade due to atoms redeposition in the nanofabrication process. In this paper, a 3D surface topography model and associated simulation program are developed to study redeposition effect for precise and deterministic fabrication of nanodots by focused ion beam. The simulation is implemented by level set method. The angular dependence of sputtering yield is calculated by a Monte Carlo simulation program – TRIDYN. The simulation results have been evaluated by focused ion beam fabrication of nanodots experiment on a silicon substrate. It demonstrates that the simulation method can precisely describe the generation of 3D surface in focused ion beam machining process (with less than 10% simulation error). Redeposition has made significant contribution to the surface generation in nanoscale fabrication by reducing more than 1/3 of intended depth. The model and simulation program developed has approved to be a good tool to determine proper machining parameter to achieve deterministic nanofabrication by focused ion beam.
LanguageEnglish
Pages31-36
Number of pages6
JournalPrecision Engineering
Volume36
Issue number1
Early online date7 Jul 2011
DOIs
Publication statusPublished - Jan 2012

Fingerprint

Focused ion beams
Fabrication
Nanotechnology
Machining
Surface topography
Sputtering
Silicon
Atoms
Substrates
Experiments

Keywords

  • nanodot
  • focused ion beam (FIB)
  • nanofabrication
  • redeposition

Cite this

Sun, J. ; Luo, Xichun ; Ritchie, J. M. ; Chang, W. ; Wang, W. / An investigation of redeposition effect for deterministic fabrication of nanodots by Focused Ion Beam. In: Precision Engineering. 2012 ; Vol. 36, No. 1. pp. 31-36.
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An investigation of redeposition effect for deterministic fabrication of nanodots by Focused Ion Beam. / Sun, J.; Luo, Xichun; Ritchie, J. M.; Chang, W.; Wang, W.

In: Precision Engineering, Vol. 36, No. 1, 01.2012, p. 31-36.

Research output: Contribution to journalArticle

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