Air-coupled linear and sparse cMUT array manufactured using MUMPs process

Alberto Octavio, Richard L. O'Leary, Simon M. Whiteley, Óscar Martínez- Graullera, Carlos Martín-Arguedas, Luis Gómez-Ullate, Francisco Montero de Espinosa

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

An assessment of the standard fabrication Micro-Electro-Mechanical Systems (MEMS) process Multi-User MEMS Processes (MUMPs) for complex air-coupled capacitive Micromachined Ultrasonic Transducer array aperture manufacture is reported. A 1-D linear array and a 2-D sparse symmetric binned-array have been designed and manufactured, and then characterised experimentally using electrical impedance measurements, laser vibrometry and air-coupled field measurement; the experimental data are supported by simulated data using Finite Element technique and field simulation based on Huygens’ principle. A methodology for the manufacture of the array structures using the MUMPs process is described. Electrical characterisation shows the devices operation at 770 kHz and the existence of large parasitic capacitances and electrical losses. Mechanical crosstalk of array substrate has been measured at -40 dB using laser vibrometry. Moreover, the laser vibrometry measurement and the field characteristics of one element reveal that each element operates as a piston radiator.
LanguageEnglish
Pages1635-1644
Number of pages10
JournalMicrosystem Technologies
Volume17
Issue number10-11
Early online date18 Sep 2011
DOIs
Publication statusPublished - 6 Oct 2011

Fingerprint

microelectromechanical systems
MEMS
Lasers
air
Air
Ultrasonic transducers
Acoustic impedance
Huygens principle
Radiators
Crosstalk
lasers
Pistons
impedance measurement
radiators
linear arrays
Capacitance
electrical impedance
pistons
crosstalk
Fabrication

Keywords

  • MEMS
  • MUMPs
  • capacitive micromachined ultrasonic transduser
  • ultrasonic array design
  • sparse array
  • air coupled ultrasound
  • field modelling
  • array cross talk

Cite this

Octavio, A., O'Leary, R. L., Whiteley, S. M., Martínez- Graullera, Ó., Martín-Arguedas, C., Gómez-Ullate, L., & Montero de Espinosa, F. (2011). Air-coupled linear and sparse cMUT array manufactured using MUMPs process. Microsystem Technologies, 17(10-11), 1635-1644. https://doi.org/10.1007/s00542-011-1346-3
Octavio, Alberto ; O'Leary, Richard L. ; Whiteley, Simon M. ; Martínez- Graullera, Óscar ; Martín-Arguedas, Carlos ; Gómez-Ullate, Luis ; Montero de Espinosa, Francisco. / Air-coupled linear and sparse cMUT array manufactured using MUMPs process. In: Microsystem Technologies. 2011 ; Vol. 17, No. 10-11. pp. 1635-1644.
@article{8664efece55246aaa738ba2e796a5176,
title = "Air-coupled linear and sparse cMUT array manufactured using MUMPs process",
abstract = "An assessment of the standard fabrication Micro-Electro-Mechanical Systems (MEMS) process Multi-User MEMS Processes (MUMPs) for complex air-coupled capacitive Micromachined Ultrasonic Transducer array aperture manufacture is reported. A 1-D linear array and a 2-D sparse symmetric binned-array have been designed and manufactured, and then characterised experimentally using electrical impedance measurements, laser vibrometry and air-coupled field measurement; the experimental data are supported by simulated data using Finite Element technique and field simulation based on Huygens’ principle. A methodology for the manufacture of the array structures using the MUMPs process is described. Electrical characterisation shows the devices operation at 770 kHz and the existence of large parasitic capacitances and electrical losses. Mechanical crosstalk of array substrate has been measured at -40 dB using laser vibrometry. Moreover, the laser vibrometry measurement and the field characteristics of one element reveal that each element operates as a piston radiator.",
keywords = "MEMS, MUMPs, capacitive micromachined ultrasonic transduser, ultrasonic array design, sparse array, air coupled ultrasound, field modelling, array cross talk",
author = "Alberto Octavio and O'Leary, {Richard L.} and Whiteley, {Simon M.} and {Mart{\'i}nez- Graullera}, {\'O}scar and Carlos Mart{\'i}n-Arguedas and Luis G{\'o}mez-Ullate and {Montero de Espinosa}, Francisco",
year = "2011",
month = "10",
day = "6",
doi = "10.1007/s00542-011-1346-3",
language = "English",
volume = "17",
pages = "1635--1644",
journal = "Microsystem Technologies",
issn = "0946-7076",
publisher = "Springer-Verlag",
number = "10-11",

}

Octavio, A, O'Leary, RL, Whiteley, SM, Martínez- Graullera, Ó, Martín-Arguedas, C, Gómez-Ullate, L & Montero de Espinosa, F 2011, 'Air-coupled linear and sparse cMUT array manufactured using MUMPs process' Microsystem Technologies, vol. 17, no. 10-11, pp. 1635-1644. https://doi.org/10.1007/s00542-011-1346-3

Air-coupled linear and sparse cMUT array manufactured using MUMPs process. / Octavio, Alberto; O'Leary, Richard L.; Whiteley, Simon M.; Martínez- Graullera, Óscar; Martín-Arguedas, Carlos; Gómez-Ullate, Luis; Montero de Espinosa, Francisco.

In: Microsystem Technologies, Vol. 17, No. 10-11, 06.10.2011, p. 1635-1644.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Air-coupled linear and sparse cMUT array manufactured using MUMPs process

AU - Octavio, Alberto

AU - O'Leary, Richard L.

AU - Whiteley, Simon M.

AU - Martínez- Graullera, Óscar

AU - Martín-Arguedas, Carlos

AU - Gómez-Ullate, Luis

AU - Montero de Espinosa, Francisco

PY - 2011/10/6

Y1 - 2011/10/6

N2 - An assessment of the standard fabrication Micro-Electro-Mechanical Systems (MEMS) process Multi-User MEMS Processes (MUMPs) for complex air-coupled capacitive Micromachined Ultrasonic Transducer array aperture manufacture is reported. A 1-D linear array and a 2-D sparse symmetric binned-array have been designed and manufactured, and then characterised experimentally using electrical impedance measurements, laser vibrometry and air-coupled field measurement; the experimental data are supported by simulated data using Finite Element technique and field simulation based on Huygens’ principle. A methodology for the manufacture of the array structures using the MUMPs process is described. Electrical characterisation shows the devices operation at 770 kHz and the existence of large parasitic capacitances and electrical losses. Mechanical crosstalk of array substrate has been measured at -40 dB using laser vibrometry. Moreover, the laser vibrometry measurement and the field characteristics of one element reveal that each element operates as a piston radiator.

AB - An assessment of the standard fabrication Micro-Electro-Mechanical Systems (MEMS) process Multi-User MEMS Processes (MUMPs) for complex air-coupled capacitive Micromachined Ultrasonic Transducer array aperture manufacture is reported. A 1-D linear array and a 2-D sparse symmetric binned-array have been designed and manufactured, and then characterised experimentally using electrical impedance measurements, laser vibrometry and air-coupled field measurement; the experimental data are supported by simulated data using Finite Element technique and field simulation based on Huygens’ principle. A methodology for the manufacture of the array structures using the MUMPs process is described. Electrical characterisation shows the devices operation at 770 kHz and the existence of large parasitic capacitances and electrical losses. Mechanical crosstalk of array substrate has been measured at -40 dB using laser vibrometry. Moreover, the laser vibrometry measurement and the field characteristics of one element reveal that each element operates as a piston radiator.

KW - MEMS

KW - MUMPs

KW - capacitive micromachined ultrasonic transduser

KW - ultrasonic array design

KW - sparse array

KW - air coupled ultrasound

KW - field modelling

KW - array cross talk

UR - http://www.scopus.com/inward/record.url?scp=80755138405&partnerID=8YFLogxK

UR - http://www.springerlink.com/content/k2065137426m1624/

U2 - 10.1007/s00542-011-1346-3

DO - 10.1007/s00542-011-1346-3

M3 - Article

VL - 17

SP - 1635

EP - 1644

JO - Microsystem Technologies

T2 - Microsystem Technologies

JF - Microsystem Technologies

SN - 0946-7076

IS - 10-11

ER -

Octavio A, O'Leary RL, Whiteley SM, Martínez- Graullera Ó, Martín-Arguedas C, Gómez-Ullate L et al. Air-coupled linear and sparse cMUT array manufactured using MUMPs process. Microsystem Technologies. 2011 Oct 6;17(10-11):1635-1644. https://doi.org/10.1007/s00542-011-1346-3