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Abstract
Transfer printing integration of planar membrane devices on photonic and electronic circuits is becoming a well established technology. Typical systems incorporate a single planar layer printed into full contact with the host substrate. In this work we present an advanced transfer print system that enables printing of optical devices in non-planar geometries and allows in-situ optical monitoring of devices. We show micro-resonators with air-clad whispering gallery modes coupled to on-chip waveguides, inverted device printing and three dimensionally assembled micro-cavities incorporating semiconductor micro-lenses and nanowire lasers. We demonstrate printing onto non-standard substrates including optical chip facets and single-mode fibre ends. The optical fibre printing was carried out with alignment assistance from in-situ optical coupling through the transfer printing system in real-time allowing active alignment of the system.
Original language | English |
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Article number | 7900111 |
Pages (from-to) | 1-11 |
Number of pages | 12 |
Journal | IEEE Journal of Selected Topics in Quantum Electronics |
Volume | 29 |
Issue number | 3 |
Early online date | 7 Dec 2022 |
DOIs | |
Publication status | Published - 30 Jun 2023 |
Keywords
- integrated optics
- optical waveguide components
- hybrid integrated circuits
- semiconductor device fabrication
- transfer printing
- photonic integrated circuits
- photonic integration