A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators

L. Li; R. Bauer; G. Brown; D. Uttamchandani

doi:10.1109/OMEMS.2011.6031038

A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators

L. Li, R. Bauer, G. Brown, D. Uttamchandani

Electronic And Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

11 Citations (Scopus)

Abstract

A hybrid two-axis scanner combining both electrostatic and electrothermal actuators was fabricated using the SOIMUMPs. Experimental evaluation shows the device is capable of three degree-of-freedom movement, and can be programmed to generate two-axis scan patterns.

Original language	English
Title of host publication	OMN2011
Subtitle of host publication	16th international conference on optical mems and nanophotonics
Place of Publication	New York
Publisher	IEEE
Pages	163-164
Number of pages	2
ISBN (Print)	9781457703362
DOIs	https://doi.org/10.1109/OMEMS.2011.6031038
Publication status	Published - 2011
Event	16th International Conference on Optical MEMS and Nanophotonics (OMN) - Istanbul, Turkey Duration: 8 Aug 2011 → 11 Aug 2011

Conference

Conference	16th International Conference on Optical MEMS and Nanophotonics (OMN)
Country/Territory	Turkey
City	Istanbul
Period	8/08/11 → 11/08/11

Keywords

mems
microactuators
optical hybrid scanner
SOIMUMPs
symmetric hybrid
scanner
electrothermal
electrostatic
actuators

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10.1109/OMEMS.2011.6031038

Cite this

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title = "A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators",

abstract = "A hybrid two-axis scanner combining both electrostatic and electrothermal actuators was fabricated using the SOIMUMPs. Experimental evaluation shows the device is capable of three degree-of-freedom movement, and can be programmed to generate two-axis scan patterns. ",

keywords = "mems, microactuators, optical hybrid scanner, SOIMUMPs, symmetric hybrid , scanner, electrothermal , electrostatic , actuators",

author = "L. Li and R. Bauer and G. Brown and D. Uttamchandani",

year = "2011",

doi = "10.1109/OMEMS.2011.6031038",

language = "English",

isbn = "9781457703362",

pages = "163--164",

booktitle = "OMN2011",

publisher = "IEEE",

note = "16th International Conference on Optical MEMS and Nanophotonics (OMN) ; Conference date: 08-08-2011 Through 11-08-2011",

}

Li, L, Bauer, R, Brown, G & Uttamchandani, D 2011, A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators. in OMN2011: 16th international conference on optical mems and nanophotonics. IEEE, New York, pp. 163-164, 16th International Conference on Optical MEMS and Nanophotonics (OMN), Istanbul, Turkey, 8/08/11. https://doi.org/10.1109/OMEMS.2011.6031038

TY - GEN

T1 - A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators

AU - Li, L.

AU - Bauer, R.

AU - Brown, G.

AU - Uttamchandani, D.

PY - 2011

Y1 - 2011

N2 - A hybrid two-axis scanner combining both electrostatic and electrothermal actuators was fabricated using the SOIMUMPs. Experimental evaluation shows the device is capable of three degree-of-freedom movement, and can be programmed to generate two-axis scan patterns.

AB - A hybrid two-axis scanner combining both electrostatic and electrothermal actuators was fabricated using the SOIMUMPs. Experimental evaluation shows the device is capable of three degree-of-freedom movement, and can be programmed to generate two-axis scan patterns.

KW - mems

KW - microactuators

KW - optical hybrid scanner

KW - SOIMUMPs

KW - symmetric hybrid

KW - scanner

KW - electrothermal

KW - electrostatic

KW - actuators

UR - http://www.scopus.com/inward/record.url?scp=82955168384&partnerID=8YFLogxK

U2 - 10.1109/OMEMS.2011.6031038

DO - 10.1109/OMEMS.2011.6031038

M3 - Conference contribution book

SN - 9781457703362

SP - 163

EP - 164

BT - OMN2011

PB - IEEE

CY - New York

T2 - 16th International Conference on Optical MEMS and Nanophotonics (OMN)

Y2 - 8 August 2011 through 11 August 2011

ER -

A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators

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Keywords

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