A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators

L. Li, R. Bauer, G. Brown, D. Uttamchandani

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

7 Citations (Scopus)

Abstract

A hybrid two-axis scanner combining both electrostatic and electrothermal actuators was fabricated using the SOIMUMPs. Experimental evaluation shows the device is capable of three degree-of-freedom movement, and can be programmed to generate two-axis scan patterns.
Original languageEnglish
Title of host publicationOMN2011
Subtitle of host publication16th international conference on optical mems and nanophotonics
Place of PublicationNew York
PublisherIEEE
Pages163-164
Number of pages2
ISBN (Print)9781457703362
DOIs
Publication statusPublished - 2011
Event16th International Conference on Optical MEMS and Nanophotonics (OMN) - Istanbul, Turkey
Duration: 8 Aug 201111 Aug 2011

Conference

Conference16th International Conference on Optical MEMS and Nanophotonics (OMN)
CountryTurkey
CityIstanbul
Period8/08/1111/08/11

Keywords

  • mems
  • microactuators
  • optical hybrid scanner
  • SOIMUMPs
  • symmetric hybrid
  • scanner
  • electrothermal
  • electrostatic
  • actuators

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  • Cite this

    Li, L., Bauer, R., Brown, G., & Uttamchandani, D. (2011). A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators. In OMN2011: 16th international conference on optical mems and nanophotonics (pp. 163-164). New York: IEEE. https://doi.org/10.1109/OMEMS.2011.6031038