A structured illumination microscopy module using two micro-electromechanical system scanning micromirrors

Research output: Contribution to journalConference Contributionpeer-review

33 Downloads (Pure)

Abstract

We present the development and application of a novel structured illumination microscope (SIM) in which the grating pattern is generated using two optical beams controlled via two micro-electro-mechanical system (MEMS) 3D scanning micromirrors, each having static angular and piston control. This arrangement enables the generation of a fully controllable spatial interference pattern at the focal plane by adjusting the positions of the beams in the back-aperture of a high numerical aperture (NA) microscope objective. The utilization of MEMS micromirrors to control angular, radial and phase positioning for the structured illumination patterns has advantages of flexible control of the fluorescence excitation illumination, with achromatic beam delivery through the same optical path, reduced spatial footprint and cost-efficient integration.

Original languageEnglish
Article number1196706
Number of pages7
JournalProceedings of SPIE
Volume11967
Early online date22 Jan 2022
DOIs
Publication statusPublished - 2 Mar 2022
EventSPIE Photonics West 2022 - San Francisco, United States
Duration: 22 Jan 202227 Jan 2022

Keywords

  • structured illumination microscopy
  • MEMS
  • super-resolution microscopy
  • life science imaging
  • 3D scanning
  • micromirrors

Fingerprint

Dive into the research topics of 'A structured illumination microscopy module using two micro-electromechanical system scanning micromirrors'. Together they form a unique fingerprint.

Cite this