A simple technique to determine the anisotropy of Young's modulus of single crystal silicon using coupled micro-cantilevers

Euan James Boyd, Bhaskar Choubey, Ian Armstrong, Deepak G. Uttamchandani

Research output: Chapter in Book/Report/Conference proceedingChapter (peer-reviewed)

1 Citation (Scopus)

Abstract

This paper reports on a simple technique to measure the anisotropy of the Young's modulus of single crystal silicon using a coupled cantilever structure fabricated in the silicon. We demonstrate that it is possible to determine the Young's modulus of five silicon micro-cantilevers, whose orientations range from 30Υ to 55Υ to the wafer flat, by measuring the resonance frequencies of just one single cantilever of the coupled structure in a " perturbed" and "unperturbed" state. In this work the perturbation of the coupled system was achieved by shortening one of the cantilevers using focused ion beam milling. The resulting Young's modulus values from this experiment agree very well with the theoretical values with a difference of less than 2.5%.
Original languageEnglish
Title of host publicationIEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), 2012
Place of PublicationPiscataway, NJ, United States
PublisherIEEE
Pages389-391
Number of pages3
ISBN (Print)9781467303248
DOIs
Publication statusPublished - 7 May 2012

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherIEEE
ISSN (Print)1084-6999

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Keywords

  • cantilever structures
  • coupled structures
  • focused ion beam milling
  • micro-cantilevers
  • single crystal silicon
  • Young's modulus

Cite this

Boyd, E. J., Choubey, B., Armstrong, I., & Uttamchandani, D. G. (2012). A simple technique to determine the anisotropy of Young's modulus of single crystal silicon using coupled micro-cantilevers. In IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), 2012 (pp. 389-391). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Piscataway, NJ, United States: IEEE. https://doi.org/10.1109/MEMSYS.2012.6170171