A simple method for capturing some complex physics of gas flows in MEMS

Duncan A. Lockerby, Jason Reese

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Abstract

An invited talk on a simple method for capturing some complex physics of gas flows in MEMS presented at 8th World Congress on Computational Mechanics (WCCM8) / 5th European Congress on Computational Methods in Applied Sciences and Engineering (ECCOMAS 2008) (Venice, Italy).
Original languageEnglish
Number of pages2
Publication statusUnpublished - 30 Jun 2008
Event8th World congress on computational mechanics / 5th European Congress on Computational Methods in Applied Sciences and Engineering ECCOMAS 2008 - Venice, Italy
Duration: 30 Jun 20084 Jul 2008

Conference

Conference8th World congress on computational mechanics / 5th European Congress on Computational Methods in Applied Sciences and Engineering ECCOMAS 2008
CountryItaly
CityVenice
Period30/06/084/07/08

Keywords

  • MEMS
  • gas microflows
  • microfluidics
  • Knudsen layer

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    Lockerby, D. A., & Reese, J. (2008). A simple method for capturing some complex physics of gas flows in MEMS. 8th World congress on computational mechanics / 5th European Congress on Computational Methods in Applied Sciences and Engineering ECCOMAS 2008 , Venice, Italy.