a-Si:H TFTs made on polyimide foil by PECVD at 150ºC

Helena Gleskova, S. Wagner, Z. Suo

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

Abstract

This chapter looks at a-Si:H TFTs made on polyimide foil by PECVD at 150ºC
Original languageEnglish
Title of host publicationFlat panel display materials - 1998
Subtitle of host publicationvolume 508 - MRS proceedings
EditorsT. S. Fahlen, S. Morozumi, G. N. Parsons, C. P. Seager, C. C. Tsai
Place of PublicationWarrendale, PA
Pages73-78
Number of pages6
Volume508
Publication statusPublished - 27 Oct 1998
EventMRS Spring Meeting 1998 - San Francisco, United States
Duration: 13 Apr 199817 Apr 1998

Publication series

NameMRS Symposium Proceedings
PublisherMaterials Research Society
Volume508

Conference

ConferenceMRS Spring Meeting 1998
CountryUnited States
CitySan Francisco
Period13/04/9817/04/98

Keywords

  • a-Si:H TFT
  • polyimide foil
  • pecvd
  • 150-degrees-C

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