a-Si:H TFTs made on polyimide foil by PECVD at 150ºC

Helena Gleskova, S. Wagner, Z. Suo

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

Abstract

This chapter looks at a-Si:H TFTs made on polyimide foil by PECVD at 150ºC
LanguageEnglish
Title of host publicationFlat panel display materials - 1998
Subtitle of host publicationvolume 508 - MRS proceedings
EditorsT. S. Fahlen, S. Morozumi, G. N. Parsons, C. P. Seager, C. C. Tsai
Place of PublicationWarrendale, PA
Pages73-78
Number of pages6
Volume508
Publication statusPublished - 27 Oct 1998
EventMRS Spring Meeting 1998 - San Francisco, United States
Duration: 13 Apr 199817 Apr 1998

Publication series

NameMRS Symposium Proceedings
PublisherMaterials Research Society
Volume508

Conference

ConferenceMRS Spring Meeting 1998
CountryUnited States
CitySan Francisco
Period13/04/9817/04/98

Fingerprint

polyimides
foils

Keywords

  • a-Si:H TFT
  • polyimide foil
  • pecvd
  • 150-degrees-C

Cite this

Gleskova, H., Wagner, S., & Suo, Z. (1998). a-Si:H TFTs made on polyimide foil by PECVD at 150ºC. In T. S. Fahlen, S. Morozumi, G. N. Parsons, C. P. Seager, & C. C. Tsai (Eds.), Flat panel display materials - 1998 : volume 508 - MRS proceedings (Vol. 508, pp. 73-78). (MRS Symposium Proceedings; Vol. 508). Warrendale, PA.
Gleskova, Helena ; Wagner, S. ; Suo, Z. / a-Si:H TFTs made on polyimide foil by PECVD at 150ºC. Flat panel display materials - 1998 : volume 508 - MRS proceedings. editor / T. S. Fahlen ; S. Morozumi ; G. N. Parsons ; C. P. Seager ; C. C. Tsai . Vol. 508 Warrendale, PA, 1998. pp. 73-78 (MRS Symposium Proceedings).
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Gleskova, H, Wagner, S & Suo, Z 1998, a-Si:H TFTs made on polyimide foil by PECVD at 150ºC. in TS Fahlen, S Morozumi, GN Parsons, CP Seager & CC Tsai (eds), Flat panel display materials - 1998 : volume 508 - MRS proceedings. vol. 508, MRS Symposium Proceedings, vol. 508, Warrendale, PA, pp. 73-78, MRS Spring Meeting 1998, San Francisco, United States, 13/04/98.

a-Si:H TFTs made on polyimide foil by PECVD at 150ºC. / Gleskova, Helena; Wagner, S.; Suo, Z.

Flat panel display materials - 1998 : volume 508 - MRS proceedings. ed. / T. S. Fahlen; S. Morozumi; G. N. Parsons; C. P. Seager; C. C. Tsai . Vol. 508 Warrendale, PA, 1998. p. 73-78 (MRS Symposium Proceedings; Vol. 508).

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

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Gleskova H, Wagner S, Suo Z. a-Si:H TFTs made on polyimide foil by PECVD at 150ºC. In Fahlen TS, Morozumi S, Parsons GN, Seager CP, Tsai CC, editors, Flat panel display materials - 1998 : volume 508 - MRS proceedings. Vol. 508. Warrendale, PA. 1998. p. 73-78. (MRS Symposium Proceedings).