Abstract
| Original language | English |
|---|---|
| Title of host publication | Flat panel display materials - 1998 |
| Subtitle of host publication | volume 508 - MRS proceedings |
| Editors | T. S. Fahlen, S. Morozumi, G. N. Parsons, C. P. Seager, C. C. Tsai |
| Place of Publication | Warrendale, PA |
| Pages | 73-78 |
| Number of pages | 6 |
| Volume | 508 |
| Publication status | Published - 27 Oct 1998 |
| Event | MRS Spring Meeting 1998 - San Francisco, United States Duration: 13 Apr 1998 → 17 Apr 1998 |
Publication series
| Name | MRS Symposium Proceedings |
|---|---|
| Publisher | Materials Research Society |
| Volume | 508 |
Conference
| Conference | MRS Spring Meeting 1998 |
|---|---|
| Country | United States |
| City | San Francisco |
| Period | 13/04/98 → 17/04/98 |
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Keywords
- a-Si:H TFT
- polyimide foil
- pecvd
- 150-degrees-C
Cite this
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a-Si:H TFTs made on polyimide foil by PECVD at 150ºC. / Gleskova, Helena; Wagner, S.; Suo, Z.
Flat panel display materials - 1998 : volume 508 - MRS proceedings. ed. / T. S. Fahlen; S. Morozumi; G. N. Parsons; C. P. Seager; C. C. Tsai . Vol. 508 Warrendale, PA, 1998. p. 73-78 (MRS Symposium Proceedings; Vol. 508).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book
TY - GEN
T1 - a-Si:H TFTs made on polyimide foil by PECVD at 150ºC
AU - Gleskova, Helena
AU - Wagner, S.
AU - Suo, Z.
PY - 1998/10/27
Y1 - 1998/10/27
N2 - This chapter looks at a-Si:H TFTs made on polyimide foil by PECVD at 150ºC
AB - This chapter looks at a-Si:H TFTs made on polyimide foil by PECVD at 150ºC
KW - a-Si:H TFT
KW - polyimide foil
KW - pecvd
KW - 150-degrees-C
M3 - Conference contribution book
SN - 9781558994140
VL - 508
T3 - MRS Symposium Proceedings
SP - 73
EP - 78
BT - Flat panel display materials - 1998
A2 - Fahlen, T. S.
A2 - Morozumi, S.
A2 - Parsons, G. N.
A2 - Seager, C. P.
A2 - Tsai , C. C.
CY - Warrendale, PA
ER -