@inproceedings{8920e41e564a414f9b04976f321c8ac0,
title = "a-Si:H TFTs made on polyimide foil by PECVD at 150ºC",
abstract = "This chapter looks at a-Si:H TFTs made on polyimide foil by PECVD at 150ºC",
keywords = "a-Si:H TFT, polyimide foil, pecvd, 150-degrees-C",
author = "Helena Gleskova and S. Wagner and Z. Suo",
year = "1998",
month = oct,
day = "27",
language = "English",
isbn = "9781558994140",
volume = "508",
series = "MRS Symposium Proceedings",
publisher = "Materials Research Society",
pages = "73--78",
editor = "Fahlen, {T. S.} and Morozumi, {S. } and Parsons, {G. N.} and Seager, {C. P.} and {Tsai }, {C. C. }",
booktitle = "Flat panel display materials - 1998",
note = "MRS Spring Meeting 1998 ; Conference date: 13-04-1998 Through 17-04-1998",
}