A novel fabrication method for a 64x64 matrix-addressable GaN-based micro-LED array

C.W. Jeon, H.W. Choi, M.D. Dawson

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

The fabrication and performance of GaN-based micro-light emitting diode (-LED) arrays with 64 × 64 elements is reported. The diameter of each element is 20 m and center-to-center spacing 30 m, giving an overall active area of the arrays of 80425 m2. Through a novel fabrication approach including a isotropic dry etching and a self-aligned isolation technique, we could easily obtain an interconnection for a matrix-addressable array device. The arrays emit >50 W per element at 3 mA drive current. Adopting a spreading metal as a p-contact, the turn-on voltage was lowered down to 3.4 V.
LanguageEnglish
Pages79-82
Number of pages3
JournalPhysica Status Solidi A
Volume200
Issue number1
DOIs
Publication statusPublished - 29 Sep 2003

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Light emitting diodes
light emitting diodes
Fabrication
fabrication
Dry etching
matrices
Metals
Electric potential
isolation
spacing
etching
electric potential
metals

Keywords

  • GaN-based microlight emitting diode
  • LED fabrication
  • LED performance

Cite this

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abstract = "The fabrication and performance of GaN-based micro-light emitting diode (-LED) arrays with 64 × 64 elements is reported. The diameter of each element is 20 m and center-to-center spacing 30 m, giving an overall active area of the arrays of 80425 m2. Through a novel fabrication approach including a isotropic dry etching and a self-aligned isolation technique, we could easily obtain an interconnection for a matrix-addressable array device. The arrays emit >50 W per element at 3 mA drive current. Adopting a spreading metal as a p-contact, the turn-on voltage was lowered down to 3.4 V.",
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A novel fabrication method for a 64x64 matrix-addressable GaN-based micro-LED array. / Jeon, C.W.; Choi, H.W.; Dawson, M.D.

In: Physica Status Solidi A, Vol. 200, No. 1, 29.09.2003, p. 79-82.

Research output: Contribution to journalArticle

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