A novel continuously variable angular vertical comb-drive with application in scanning micromirror

Ralf R. Bauer, Gordon G. Brown, Lì L. Lì, Deepak G. Uttamchandani

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

2 Citations (Scopus)

Abstract

An angular vertical comb-drive (AVC) with electrically controllable initial comb-offset is presented in the context of a single crystalline silicon scanning micromirror. The electrothermal actuated control of the variable offset is used to investigate the influence of the initial comb offset on the dynamic resonance behavior of the scanning mirror. With possible maximum vertical comb-offsets between 10 μm and 5 μm a higher dynamic mirror scan angle at the mechanical resonance frequency of 6 kHz is found for higher initial offsets. The same behavior of higher scan angles for higher offsets is also shown when mechanically controlling the initial comb-offset including negative offset values and offsets close to 0 μm.
LanguageEnglish
Title of host publication2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
Place of Publication9781467356558
PublisherIEEE
Pages528-531
Number of pages4
DOIs
Publication statusPublished - 2013
EventIEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan, Province of China
Duration: 20 Jan 201324 Jan 2013

Conference

ConferenceIEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
CountryTaiwan, Province of China
CityTaipei
Period20/01/1324/01/13

Fingerprint

Mirrors
Scanning
Crystalline materials
Silicon

Keywords

  • novel
  • continuously variable
  • angular vertical comb-drive
  • application
  • scanning micromirror

Cite this

Bauer, R. R., Brown, G. G., Lì, L. L., & Uttamchandani, D. G. (2013). A novel continuously variable angular vertical comb-drive with application in scanning micromirror. In 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 528-531). 9781467356558: IEEE. https://doi.org/10.1109/MEMSYS.2013.6474295
Bauer, Ralf R. ; Brown, Gordon G. ; Lì, Lì L. ; Uttamchandani, Deepak G. / A novel continuously variable angular vertical comb-drive with application in scanning micromirror. 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS). 9781467356558 : IEEE, 2013. pp. 528-531
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title = "A novel continuously variable angular vertical comb-drive with application in scanning micromirror",
abstract = "An angular vertical comb-drive (AVC) with electrically controllable initial comb-offset is presented in the context of a single crystalline silicon scanning micromirror. The electrothermal actuated control of the variable offset is used to investigate the influence of the initial comb offset on the dynamic resonance behavior of the scanning mirror. With possible maximum vertical comb-offsets between 10 μm and 5 μm a higher dynamic mirror scan angle at the mechanical resonance frequency of 6 kHz is found for higher initial offsets. The same behavior of higher scan angles for higher offsets is also shown when mechanically controlling the initial comb-offset including negative offset values and offsets close to 0 μm.",
keywords = "novel, continuously variable, angular vertical comb-drive, application , scanning micromirror",
author = "Bauer, {Ralf R.} and Brown, {Gordon G.} and L{\`i}, {L{\`i} L.} and Uttamchandani, {Deepak G.}",
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Bauer, RR, Brown, GG, Lì, LL & Uttamchandani, DG 2013, A novel continuously variable angular vertical comb-drive with application in scanning micromirror. in 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 9781467356558, pp. 528-531, IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), Taipei, Taiwan, Province of China, 20/01/13. https://doi.org/10.1109/MEMSYS.2013.6474295

A novel continuously variable angular vertical comb-drive with application in scanning micromirror. / Bauer, Ralf R.; Brown, Gordon G.; Lì, Lì L.; Uttamchandani, Deepak G.

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS). 9781467356558 : IEEE, 2013. p. 528-531.

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

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N2 - An angular vertical comb-drive (AVC) with electrically controllable initial comb-offset is presented in the context of a single crystalline silicon scanning micromirror. The electrothermal actuated control of the variable offset is used to investigate the influence of the initial comb offset on the dynamic resonance behavior of the scanning mirror. With possible maximum vertical comb-offsets between 10 μm and 5 μm a higher dynamic mirror scan angle at the mechanical resonance frequency of 6 kHz is found for higher initial offsets. The same behavior of higher scan angles for higher offsets is also shown when mechanically controlling the initial comb-offset including negative offset values and offsets close to 0 μm.

AB - An angular vertical comb-drive (AVC) with electrically controllable initial comb-offset is presented in the context of a single crystalline silicon scanning micromirror. The electrothermal actuated control of the variable offset is used to investigate the influence of the initial comb offset on the dynamic resonance behavior of the scanning mirror. With possible maximum vertical comb-offsets between 10 μm and 5 μm a higher dynamic mirror scan angle at the mechanical resonance frequency of 6 kHz is found for higher initial offsets. The same behavior of higher scan angles for higher offsets is also shown when mechanically controlling the initial comb-offset including negative offset values and offsets close to 0 μm.

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Bauer RR, Brown GG, Lì LL, Uttamchandani DG. A novel continuously variable angular vertical comb-drive with application in scanning micromirror. In 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS). 9781467356558: IEEE. 2013. p. 528-531 https://doi.org/10.1109/MEMSYS.2013.6474295