A novel continuously variable angular vertical comb-drive with application in scanning micromirror

Ralf R. Bauer; Gordon G. Brown; Lì L. Lì; Deepak G. Uttamchandani

doi:10.1109/MEMSYS.2013.6474295

A novel continuously variable angular vertical comb-drive with application in scanning micromirror

Ralf R. Bauer, Gordon G. Brown, Lì L. Lì, Deepak G. Uttamchandani

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

2 Citations (Scopus)

119 Downloads (Pure)

Abstract

An angular vertical comb-drive (AVC) with electrically controllable initial comb-offset is presented in the context of a single crystalline silicon scanning micromirror. The electrothermal actuated control of the variable offset is used to investigate the influence of the initial comb offset on the dynamic resonance behavior of the scanning mirror. With possible maximum vertical comb-offsets between 10 μm and 5 μm a higher dynamic mirror scan angle at the mechanical resonance frequency of 6 kHz is found for higher initial offsets. The same behavior of higher scan angles for higher offsets is also shown when mechanically controlling the initial comb-offset including negative offset values and offsets close to 0 μm.

Original language	English
Title of host publication	2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
Place of Publication	9781467356558
Publisher	IEEE
Pages	528-531
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2013.6474295
Publication status	Published - 2013
Event	IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan, Province of China Duration: 20 Jan 2013 → 24 Jan 2013

Conference

Conference	IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
Country	Taiwan, Province of China
City	Taipei
Period	20/01/13 → 24/01/13

Keywords

novel
continuously variable
angular vertical comb-drive
application
scanning micromirror

Access to Document

10.1109/MEMSYS.2013.6474295

06474295Submitted manuscript, 708 KB

Link to publication in Scopus

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Cite this

@inproceedings{b780d02a5798464689f7f356cb98de5d,

title = "A novel continuously variable angular vertical comb-drive with application in scanning micromirror",

abstract = "An angular vertical comb-drive (AVC) with electrically controllable initial comb-offset is presented in the context of a single crystalline silicon scanning micromirror. The electrothermal actuated control of the variable offset is used to investigate the influence of the initial comb offset on the dynamic resonance behavior of the scanning mirror. With possible maximum vertical comb-offsets between 10 μm and 5 μm a higher dynamic mirror scan angle at the mechanical resonance frequency of 6 kHz is found for higher initial offsets. The same behavior of higher scan angles for higher offsets is also shown when mechanically controlling the initial comb-offset including negative offset values and offsets close to 0 μm.",

keywords = "novel, continuously variable, angular vertical comb-drive, application , scanning micromirror",

author = "Bauer, {Ralf R.} and Brown, {Gordon G.} and L{\`i}, {L{\`i} L.} and Uttamchandani, {Deepak G.}",

year = "2013",

doi = "10.1109/MEMSYS.2013.6474295",

language = "English",

pages = "528--531",

booktitle = "2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "IEEE",

note = "IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) ; Conference date: 20-01-2013 Through 24-01-2013",

}

Bauer, RR, Brown, GG, Lì, LL & Uttamchandani, DG 2013, A novel continuously variable angular vertical comb-drive with application in scanning micromirror. in 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 9781467356558, pp. 528-531, IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), Taipei, Taiwan, Province of China, 20/01/13. https://doi.org/10.1109/MEMSYS.2013.6474295

A novel continuously variable angular vertical comb-drive with application in scanning micromirror. / Bauer, Ralf R.; Brown, Gordon G.; Lì, Lì L.; Uttamchandani, Deepak G.

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS). 9781467356558 : IEEE, 2013. p. 528-531.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

TY - GEN

T1 - A novel continuously variable angular vertical comb-drive with application in scanning micromirror

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AU - Brown, Gordon G.

AU - Lì, Lì L.

AU - Uttamchandani, Deepak G.

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N2 - An angular vertical comb-drive (AVC) with electrically controllable initial comb-offset is presented in the context of a single crystalline silicon scanning micromirror. The electrothermal actuated control of the variable offset is used to investigate the influence of the initial comb offset on the dynamic resonance behavior of the scanning mirror. With possible maximum vertical comb-offsets between 10 μm and 5 μm a higher dynamic mirror scan angle at the mechanical resonance frequency of 6 kHz is found for higher initial offsets. The same behavior of higher scan angles for higher offsets is also shown when mechanically controlling the initial comb-offset including negative offset values and offsets close to 0 μm.

AB - An angular vertical comb-drive (AVC) with electrically controllable initial comb-offset is presented in the context of a single crystalline silicon scanning micromirror. The electrothermal actuated control of the variable offset is used to investigate the influence of the initial comb offset on the dynamic resonance behavior of the scanning mirror. With possible maximum vertical comb-offsets between 10 μm and 5 μm a higher dynamic mirror scan angle at the mechanical resonance frequency of 6 kHz is found for higher initial offsets. The same behavior of higher scan angles for higher offsets is also shown when mechanically controlling the initial comb-offset including negative offset values and offsets close to 0 μm.

KW - novel

KW - continuously variable

KW - angular vertical comb-drive

KW - application

KW - scanning micromirror

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BT - 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

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