A MEMS microphone inspired by Ormia for spatial sound detection

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51 Downloads (Pure)

Abstract

This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two individual bi-directional microphones. Combining this architecture with the fly Ormia ochracea’s tympana mechanism, this microphone is also the first biomimetic MEMS microphone with piezoelectric sensing, designed for 2D sound localization.
Original languageEnglish
Number of pages4
DOIs
Publication statusPublished - 26 Apr 2018
EventThe 31st IEEE International Conference on Micro Electro Mechanical Systems - Belfast Waterfront, Belfast, United Kingdom
Duration: 21 Jan 201825 Jan 2018
http://www.mems2018.org/

Conference

ConferenceThe 31st IEEE International Conference on Micro Electro Mechanical Systems
Abbreviated titleMEMS 2018
CountryUnited Kingdom
CityBelfast
Period21/01/1825/01/18
Internet address

Keywords

  • Ormia-inspired MEMS microphone
  • 2D sound localization
  • piezoelectric
  • Micro Electro Mechanical Systems
  • sensors

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  • Cite this

    Zhang, Y., Bauer, R., Whitmer, W. M., Jackson, J. C., Windmill, J. F. C., & Uttamchandani, D. (2018). A MEMS microphone inspired by Ormia for spatial sound detection. Paper presented at The 31st IEEE International Conference on Micro Electro Mechanical Systems, Belfast, United Kingdom. https://doi.org/10.1109/MEMSYS.2018.8346532