A MEMS microphone inspired by Ormia for spatial sound detection

Research output: Contribution to conferencePaper

Abstract

This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two individual bi-directional microphones. Combining this architecture with the fly Ormia ochracea’s tympana mechanism, this microphone is also the first biomimetic MEMS microphone with piezoelectric sensing, designed for 2D sound localization.

Conference

ConferenceThe 31st IEEE International Conference on Micro Electro Mechanical Systems
Abbreviated titleMEMS 2018
CountryUnited Kingdom
CityBelfast
Period21/01/1825/01/18
Internet address

Fingerprint

Microphones
MEMS
Acoustic waves
Biomimetics
Acoustics
Membranes
Sensors

Keywords

  • Ormia-inspired MEMS microphone
  • 2D sound localization
  • piezoelectric
  • Micro Electro Mechanical Systems
  • sensors

Cite this

Zhang, Y., Bauer, R., Whitmer, W. M., Jackson, J. C., Windmill, J. F. C., & Uttamchandani, D. (Accepted/In press). A MEMS microphone inspired by Ormia for spatial sound detection. Paper presented at The 31st IEEE International Conference on Micro Electro Mechanical Systems, Belfast, United Kingdom.
Zhang, Yansheng ; Bauer, Ralf ; Whitmer, William M. ; Jackson, Joseph C. ; Windmill, James F.C. ; Uttamchandani, Deepak. / A MEMS microphone inspired by Ormia for spatial sound detection. Paper presented at The 31st IEEE International Conference on Micro Electro Mechanical Systems, Belfast, United Kingdom.4 p.
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title = "A MEMS microphone inspired by Ormia for spatial sound detection",
abstract = "This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two individual bi-directional microphones. Combining this architecture with the fly Ormia ochracea’s tympana mechanism, this microphone is also the first biomimetic MEMS microphone with piezoelectric sensing, designed for 2D sound localization.",
keywords = "Ormia-inspired MEMS microphone, 2D sound localization, piezoelectric, Micro Electro Mechanical Systems, sensors",
author = "Yansheng Zhang and Ralf Bauer and Whitmer, {William M.} and Jackson, {Joseph C.} and Windmill, {James F.C.} and Deepak Uttamchandani",
note = "{\circledC} 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.; The 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 ; Conference date: 21-01-2018 Through 25-01-2018",
year = "2017",
month = "11",
day = "21",
language = "English",
url = "http://www.mems2018.org/",

}

Zhang, Y, Bauer, R, Whitmer, WM, Jackson, JC, Windmill, JFC & Uttamchandani, D 2017, 'A MEMS microphone inspired by Ormia for spatial sound detection' Paper presented at The 31st IEEE International Conference on Micro Electro Mechanical Systems, Belfast, United Kingdom, 21/01/18 - 25/01/18, .

A MEMS microphone inspired by Ormia for spatial sound detection. / Zhang, Yansheng; Bauer, Ralf; Whitmer, William M.; Jackson, Joseph C.; Windmill, James F.C.; Uttamchandani, Deepak.

2017. Paper presented at The 31st IEEE International Conference on Micro Electro Mechanical Systems, Belfast, United Kingdom.

Research output: Contribution to conferencePaper

TY - CONF

T1 - A MEMS microphone inspired by Ormia for spatial sound detection

AU - Zhang, Yansheng

AU - Bauer, Ralf

AU - Whitmer, William M.

AU - Jackson, Joseph C.

AU - Windmill, James F.C.

AU - Uttamchandani, Deepak

N1 - © 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2017/11/21

Y1 - 2017/11/21

N2 - This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two individual bi-directional microphones. Combining this architecture with the fly Ormia ochracea’s tympana mechanism, this microphone is also the first biomimetic MEMS microphone with piezoelectric sensing, designed for 2D sound localization.

AB - This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two individual bi-directional microphones. Combining this architecture with the fly Ormia ochracea’s tympana mechanism, this microphone is also the first biomimetic MEMS microphone with piezoelectric sensing, designed for 2D sound localization.

KW - Ormia-inspired MEMS microphone

KW - 2D sound localization

KW - piezoelectric

KW - Micro Electro Mechanical Systems

KW - sensors

M3 - Paper

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Zhang Y, Bauer R, Whitmer WM, Jackson JC, Windmill JFC, Uttamchandani D. A MEMS microphone inspired by Ormia for spatial sound detection. 2017. Paper presented at The 31st IEEE International Conference on Micro Electro Mechanical Systems, Belfast, United Kingdom.