A MEMS microphone inspired by Ormia for spatial sound detection

Yansheng Zhang; Ralf Bauer; William M. Whitmer; Joseph C. Jackson; James F.C. Windmill; Deepak Uttamchandani

doi:10.1109/MEMSYS.2018.8346532

A MEMS microphone inspired by Ormia for spatial sound detection

Yansheng Zhang, Ralf Bauer, William M. Whitmer, Joseph C. Jackson, James F.C. Windmill, Deepak Uttamchandani

Electronic And Electrical Engineering

Research output: Contribution to conference › Paper › peer-review

14 Citations (Scopus)

81 Downloads (Pure)

Abstract

This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two individual bi-directional microphones. Combining this architecture with the fly Ormia ochracea’s tympana mechanism, this microphone is also the first biomimetic MEMS microphone with piezoelectric sensing, designed for 2D sound localization.

Original language	English
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346532
Publication status	Published - 26 Apr 2018
Event	The 31st IEEE International Conference on Micro Electro Mechanical Systems - Belfast Waterfront, Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018 http://www.mems2018.org/

Conference

Conference	The 31st IEEE International Conference on Micro Electro Mechanical Systems
Abbreviated title	MEMS 2018
Country/Territory	United Kingdom
City	Belfast
Period	21/01/18 → 25/01/18
Internet address	http://www.mems2018.org/

Keywords

Ormia-inspired MEMS microphone
2D sound localization
piezoelectric
Micro Electro Mechanical Systems
sensors

Access to Document

10.1109/MEMSYS.2018.8346532

Zhang-etal-MEMS-2018-A-MEMS-microphone-inspired-by-Ormia-for-spatial-sound-detectionAccepted author manuscript, 1.23 MB

2 Finished

Novel directional microphone design for speech enhancement in complex environments
Windmill, J. (Principal Investigator), Jackson, J. (Co-investigator) & Uttamchandani, D. (Co-investigator)
EPSRC (Engineering and Physical Sciences Research Council)
1/07/15 → 28/02/19
Project: Research
Soft And Small: Acoustic Transducers Inspired By Nature - SASATIN (EU European Research Council (ERC) Consolidator Grant)
Windmill, J. (Principal Investigator)
European Commission - FP7 - European Research Council
1/02/14 → 31/01/19
Project: Research

14 Citations
3 Conference contribution book
1 Article
1 Conference Contribution

Influence of microphone housing on the directional response of piezoelectric MEMS microphones inspired by Ormia ochracea
Bauer, R., Zhang, Y., Jackson, J. C., Whitmer, W. M., Brimijoin, W. O., Akeroyd, M. A., Uttamchandani, D. & Windmill, J. F. C., 1 Sept 2017, In: IEEE Sensors Journal. 17, 17, p. 5529-5536 8 p.
Research output: Contribution to journal › Article › peer-review

Open Access
File
23 Citations (Scopus)

145 Downloads (Pure)
New ormia-inspired directional MEMS microphone operating in a low frequency band
Zhang, Y., Bauer, R., Windmill, J. F., Uttamchandani, D. & Jackson, J., 10 Jun 2017, In: Journal of the Acoustical Society of America. 141, 5, 1 p., 3794.
Research output: Contribution to journal › Conference Contribution › peer-review

Open Access
File
60 Downloads (Pure)
Housing influence on multi-band directional MEMS microphones inspired by Ormia ochracea
Bauer, R., Zhang, Y., Jackson, J. C., Whitmer, W. M., Brimijoin, W. O., Akeroyd, M., Uttamchandani, D. & Windmill, J. F. C., 9 Jan 2017, IEEE Sensors, 2016. Piscataway, N.J.: IEEE, 3 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

Open Access
File
6 Citations (Scopus)

86 Downloads (Pure)

Cite this

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title = "A MEMS microphone inspired by Ormia for spatial sound detection",

abstract = "This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two individual bi-directional microphones. Combining this architecture with the fly Ormia ochracea{\textquoteright}s tympana mechanism, this microphone is also the first biomimetic MEMS microphone with piezoelectric sensing, designed for 2D sound localization.",

keywords = "Ormia-inspired MEMS microphone, 2D sound localization, piezoelectric, Micro Electro Mechanical Systems, sensors",

author = "Yansheng Zhang and Ralf Bauer and Whitmer, {William M.} and Jackson, {Joseph C.} and Windmill, {James F.C.} and Deepak Uttamchandani",

note = "{\textcopyright} 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.; The 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 ; Conference date: 21-01-2018 Through 25-01-2018",

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AU - Zhang, Yansheng

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AU - Whitmer, William M.

AU - Jackson, Joseph C.

AU - Windmill, James F.C.

AU - Uttamchandani, Deepak

N1 - © 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2018/4/26

Y1 - 2018/4/26

N2 - This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two individual bi-directional microphones. Combining this architecture with the fly Ormia ochracea’s tympana mechanism, this microphone is also the first biomimetic MEMS microphone with piezoelectric sensing, designed for 2D sound localization.

AB - This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two individual bi-directional microphones. Combining this architecture with the fly Ormia ochracea’s tympana mechanism, this microphone is also the first biomimetic MEMS microphone with piezoelectric sensing, designed for 2D sound localization.

KW - Ormia-inspired MEMS microphone

KW - 2D sound localization

KW - piezoelectric

KW - Micro Electro Mechanical Systems

KW - sensors

U2 - 10.1109/MEMSYS.2018.8346532

DO - 10.1109/MEMSYS.2018.8346532

M3 - Paper

T2 - The 31st IEEE International Conference on Micro Electro Mechanical Systems

Y2 - 21 January 2018 through 25 January 2018

ER -

A MEMS microphone inspired by Ormia for spatial sound detection

Abstract

Conference

Keywords

Access to Document

Fingerprint

Projects

Novel directional microphone design for speech enhancement in complex environments

Soft And Small: Acoustic Transducers Inspired By Nature - SASATIN (EU European Research Council (ERC) Consolidator Grant)

Research output

Influence of microphone housing on the directional response of piezoelectric MEMS microphones inspired by Ormia ochracea

New ormia-inspired directional MEMS microphone operating in a low frequency band

Housing influence on multi-band directional MEMS microphones inspired by Ormia ochracea

Cite this