A low frequency dual-band operational microphone mimicking the hearing property of Ormia ochracea

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6 Citations (Scopus)

Abstract

This paper introduces a directional MEMS microphone designed for hearing aid applications appropriate to low frequency hearing impairment, inspired by the hearing mechanism of a fly, the female Ormia ochracea. It uses both piezoelectric and capacitive sensing schemes. In order to obtain a high sensitivity at low frequency bands, the presented microphone is designed to have two resonance frequencies below the threshold of low frequency hearing loss at approximately 2 kHz. One is around 500 Hz and the other is slightly above 2 kHz. The novel dual sensing mechanism allows for optimization of the microphone sensitivity at both frequencies, with a maximum open-circuit (excluding pre-amplification) acoustic response captured via differential piezoelectric sensing at approximately – 46 dB (V) ref. 94 dB (SPL) at the resonance frequencies. The corresponding minimum detectable sound pressure level is just below -12 dB. The comb finger capacitive sensing was employed due to a lower electrical response generated from a ground referenced single-ended output by the piezoelectric sensing at the first resonance frequency compared to the second resonance frequency. The capacitive sensing mechanism, connected to a charge amplifier, generates a -28.4 dB (V) ref. 94 dB (SPL) acoustic response when the device is excited at either of the two resonance frequencies. Due to the asymmetric geometry and the 400 µm thick substrate, the device is predicted to perform as a bi-directional microphone below 3 kHz, which is shown by the measured directional polar patterns.
LanguageEnglish
Pages667-676
Number of pages10
JournalJournal of Microelectromechanical Systems
Volume27
Issue number4
Early online date20 Jun 2018
DOIs
Publication statusPublished - 2 Aug 2018

Fingerprint

Audition
Microphones
Acoustics
Hearing aids
Frequency bands
MEMS
Amplification
Acoustic waves
Geometry
Networks (circuits)
Substrates

Keywords

  • MEMS
  • microphones
  • biologically inspired
  • piezoelectric sensing
  • low frequency

Cite this

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title = "A low frequency dual-band operational microphone mimicking the hearing property of Ormia ochracea",
abstract = "This paper introduces a directional MEMS microphone designed for hearing aid applications appropriate to low frequency hearing impairment, inspired by the hearing mechanism of a fly, the female Ormia ochracea. It uses both piezoelectric and capacitive sensing schemes. In order to obtain a high sensitivity at low frequency bands, the presented microphone is designed to have two resonance frequencies below the threshold of low frequency hearing loss at approximately 2 kHz. One is around 500 Hz and the other is slightly above 2 kHz. The novel dual sensing mechanism allows for optimization of the microphone sensitivity at both frequencies, with a maximum open-circuit (excluding pre-amplification) acoustic response captured via differential piezoelectric sensing at approximately – 46 dB (V) ref. 94 dB (SPL) at the resonance frequencies. The corresponding minimum detectable sound pressure level is just below -12 dB. The comb finger capacitive sensing was employed due to a lower electrical response generated from a ground referenced single-ended output by the piezoelectric sensing at the first resonance frequency compared to the second resonance frequency. The capacitive sensing mechanism, connected to a charge amplifier, generates a -28.4 dB (V) ref. 94 dB (SPL) acoustic response when the device is excited at either of the two resonance frequencies. Due to the asymmetric geometry and the 400 µm thick substrate, the device is predicted to perform as a bi-directional microphone below 3 kHz, which is shown by the measured directional polar patterns.",
keywords = "MEMS, microphones, biologically inspired, piezoelectric sensing, low frequency",
author = "Yansheng Zhang and Ralf Bauer and Jackson, {Joseph C.} and Whitmer, {William M.} and Windmill, {James F. C.} and Deepak Uttamchandani",
year = "2018",
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N2 - This paper introduces a directional MEMS microphone designed for hearing aid applications appropriate to low frequency hearing impairment, inspired by the hearing mechanism of a fly, the female Ormia ochracea. It uses both piezoelectric and capacitive sensing schemes. In order to obtain a high sensitivity at low frequency bands, the presented microphone is designed to have two resonance frequencies below the threshold of low frequency hearing loss at approximately 2 kHz. One is around 500 Hz and the other is slightly above 2 kHz. The novel dual sensing mechanism allows for optimization of the microphone sensitivity at both frequencies, with a maximum open-circuit (excluding pre-amplification) acoustic response captured via differential piezoelectric sensing at approximately – 46 dB (V) ref. 94 dB (SPL) at the resonance frequencies. The corresponding minimum detectable sound pressure level is just below -12 dB. The comb finger capacitive sensing was employed due to a lower electrical response generated from a ground referenced single-ended output by the piezoelectric sensing at the first resonance frequency compared to the second resonance frequency. The capacitive sensing mechanism, connected to a charge amplifier, generates a -28.4 dB (V) ref. 94 dB (SPL) acoustic response when the device is excited at either of the two resonance frequencies. Due to the asymmetric geometry and the 400 µm thick substrate, the device is predicted to perform as a bi-directional microphone below 3 kHz, which is shown by the measured directional polar patterns.

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