Abstract
This paper demonstrates a simple and low cost technology to reliably and accurately package integrated chips. Microchannels and cavities of minimum feature size of 500 μm can be reliably reproduced. In addition, the curing depth in relation to the exposure time was investigated. A simple microfluidic device, consisting of a 500 μm channel and 2 mm ports, was manufactured to demonstrate the possibilities of this technology. Extensive electrochemical experiments showed that the packaging material is a good insulator and leaves no residue on the chip.
Original language | English |
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Title of host publication | 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017 |
Editors | Benoit Charlot, Yoshio Mita, Pascal Nouet, Claude Pellet, Francis Pressecq, Peter Schneider, Stewart Smith |
Place of Publication | Piscataway, NJ |
Publisher | IEEE |
Number of pages | 6 |
ISBN (Print) | 9781538629529 |
DOIs | |
Publication status | Published - 20 Jul 2017 |
Event | 19th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017 - Bordeaux, France Duration: 29 May 2017 → 1 Jun 2017 |
Conference
Conference | 19th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017 |
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Country/Territory | France |
City | Bordeaux |
Period | 29/05/17 → 1/06/17 |
Keywords
- biosensors
- electrochemistry
- packaging