A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications

Paul Janin, Ralf Bauer, Paul Griffin, Erling Riis, Deepak Uttamchandani

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

1 Citation (Scopus)

59 Downloads (Pure)

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2019
Fast piezoelectric scanning MEMS mirror for 1D ion adressing
Janin, P., Bauer, R., Griffin, P., Riis, E. & Uttamchandani, D., 9 Dec 2019. 2 p.
Research output: Contribution to conference › Abstract › peer-review

Open Access
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3 Citations (Scopus)

81 Downloads (Pure)