A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications

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Abstract

We present a high-frequency, tunable, piezoelectric MEMS resonant scanner producing an optical scan angle of more than 2° at frequencies above 100 kHz, with non-contact frequency tuning capabilities. The device is fabricated using a cost-efficient multiuser silicon-on-insulator (SOI) process. The scanner uses thin-film piezoelectric aluminium nitride actuators to drive out-of-plane rotation of a 200 μm diameter mirror plate through mechanical coupling stages. Up to 3.6 kHz frequency tuning is achieved through on-chip thermally actuated non-contact beam tips placed adjacent to the scanner. The scanner is intended for use in small-scale, fast optomechanical applications requiring careful synchronization through frequency tuning.

Original languageEnglish
Title of host publication2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Place of PublicationNew York, USA
PublisherIEEE
Pages294-297
Number of pages4
ISBN (Electronic)978-1-6654-1912-3
ISBN (Print)978-1-6654-3024-1
DOIs
Publication statusPublished - 25 Jan 2021
Event2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) - Online
Duration: 25 Jan 202129 Jan 2021
https://www.mems21.org/

Publication series

NameIEEE International Conference on Micro Electrical Mechanical Systems (MEMS)
PublisherIEEE
ISSN (Print)1084-6999
ISSN (Electronic)2160-1968

Conference

Conference2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Abbreviated titleIEEE MEMS 2021
Period25/01/2129/01/21
Internet address

Keywords

  • optical MEMS
  • scanning mirrors
  • piezoelectric
  • frequency tuning
  • thermal actuators

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