A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications

Paul Janin; Ralf Bauer; Paul Griffin; Erling Riis; Deepak Uttamchandani

doi:10.1109/MEMS51782.2021.9375302

A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications

Paul Janin, Ralf Bauer, Paul Griffin, Erling Riis, Deepak Uttamchandani

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

1 Citation (Scopus)

45 Downloads (Pure)

Abstract

We present a high-frequency, tunable, piezoelectric MEMS resonant scanner producing an optical scan angle of more than 2° at frequencies above 100 kHz, with non-contact frequency tuning capabilities. The device is fabricated using a cost-efficient multiuser silicon-on-insulator (SOI) process. The scanner uses thin-film piezoelectric aluminium nitride actuators to drive out-of-plane rotation of a 200 μm diameter mirror plate through mechanical coupling stages. Up to 3.6 kHz frequency tuning is achieved through on-chip thermally actuated non-contact beam tips placed adjacent to the scanner. The scanner is intended for use in small-scale, fast optomechanical applications requiring careful synchronization through frequency tuning.

Original language	English
Title of host publication	2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Place of Publication	New York, USA
Publisher	IEEE
Pages	294-297
Number of pages	4
ISBN (Electronic)	978-1-6654-1912-3
ISBN (Print)	978-1-6654-3024-1
DOIs	https://doi.org/10.1109/MEMS51782.2021.9375302
Publication status	Published - 25 Jan 2021
Event	2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) - Online Duration: 25 Jan 2021 → 29 Jan 2021 https://www.mems21.org/

Publication series

Name	IEEE International Conference on Micro Electrical Mechanical Systems (MEMS)
Publisher	IEEE
ISSN (Print)	1084-6999
ISSN (Electronic)	2160-1968

Conference

Conference	2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Abbreviated title	IEEE MEMS 2021
Period	25/01/21 → 29/01/21
Internet address	https://www.mems21.org/

Keywords

optical MEMS
scanning mirrors
piezoelectric
frequency tuning
thermal actuators

Access to Document

10.1109/MEMS51782.2021.9375302

Janin-etal-MEMS-2021-A high-frequency-tunable-piezoelectric-MEMS-scanner-for-fast-addressing-applicationsAccepted author manuscript, 2.06 MB

Cite this

Janin, P., Bauer, R., Griffin, P., Riis, E., & Uttamchandani, D. (2021). A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications. In 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 294-297). (IEEE International Conference on Micro Electrical Mechanical Systems (MEMS)). IEEE. https://doi.org/10.1109/MEMS51782.2021.9375302

@inproceedings{7f34fb2513434284953266894e4055f2,

title = "A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications",

abstract = "We present a high-frequency, tunable, piezoelectric MEMS resonant scanner producing an optical scan angle of more than 2° at frequencies above 100 kHz, with non-contact frequency tuning capabilities. The device is fabricated using a cost-efficient multiuser silicon-on-insulator (SOI) process. The scanner uses thin-film piezoelectric aluminium nitride actuators to drive out-of-plane rotation of a 200 μm diameter mirror plate through mechanical coupling stages. Up to 3.6 kHz frequency tuning is achieved through on-chip thermally actuated non-contact beam tips placed adjacent to the scanner. The scanner is intended for use in small-scale, fast optomechanical applications requiring careful synchronization through frequency tuning.",

keywords = "optical MEMS, scanning mirrors, piezoelectric, frequency tuning, thermal actuators",

author = "Paul Janin and Ralf Bauer and Paul Griffin and Erling Riis and Deepak Uttamchandani",

note = "{\textcopyright} 2021 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.; 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), IEEE MEMS 2021 ; Conference date: 25-01-2021 Through 29-01-2021",

year = "2021",

month = jan,

day = "25",

doi = "10.1109/MEMS51782.2021.9375302",

language = "English",

isbn = "978-1-6654-3024-1",

series = "IEEE International Conference on Micro Electrical Mechanical Systems (MEMS)",

publisher = "IEEE",

pages = "294--297",

booktitle = "2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)",

url = "https://www.mems21.org/",

}

Janin, P, Bauer, R , Griffin, P , Riis, E & Uttamchandani, D 2021, A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications. in 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE International Conference on Micro Electrical Mechanical Systems (MEMS), IEEE, New York, USA, pp. 294-297, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), 25/01/21. https://doi.org/10.1109/MEMS51782.2021.9375302

A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications. / Janin, Paul; Bauer, Ralf ; Griffin, Paul et al.
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). New York, USA: IEEE, 2021. p. 294-297 (IEEE International Conference on Micro Electrical Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

TY - GEN

T1 - A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications

AU - Janin, Paul

AU - Bauer, Ralf

AU - Griffin, Paul

AU - Riis, Erling

AU - Uttamchandani, Deepak

N1 - © 2021 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2021/1/25

Y1 - 2021/1/25

N2 - We present a high-frequency, tunable, piezoelectric MEMS resonant scanner producing an optical scan angle of more than 2° at frequencies above 100 kHz, with non-contact frequency tuning capabilities. The device is fabricated using a cost-efficient multiuser silicon-on-insulator (SOI) process. The scanner uses thin-film piezoelectric aluminium nitride actuators to drive out-of-plane rotation of a 200 μm diameter mirror plate through mechanical coupling stages. Up to 3.6 kHz frequency tuning is achieved through on-chip thermally actuated non-contact beam tips placed adjacent to the scanner. The scanner is intended for use in small-scale, fast optomechanical applications requiring careful synchronization through frequency tuning.

AB - We present a high-frequency, tunable, piezoelectric MEMS resonant scanner producing an optical scan angle of more than 2° at frequencies above 100 kHz, with non-contact frequency tuning capabilities. The device is fabricated using a cost-efficient multiuser silicon-on-insulator (SOI) process. The scanner uses thin-film piezoelectric aluminium nitride actuators to drive out-of-plane rotation of a 200 μm diameter mirror plate through mechanical coupling stages. Up to 3.6 kHz frequency tuning is achieved through on-chip thermally actuated non-contact beam tips placed adjacent to the scanner. The scanner is intended for use in small-scale, fast optomechanical applications requiring careful synchronization through frequency tuning.

KW - optical MEMS

KW - scanning mirrors

KW - piezoelectric

KW - frequency tuning

KW - thermal actuators

UR - https://www.mems21.org/

U2 - 10.1109/MEMS51782.2021.9375302

DO - 10.1109/MEMS51782.2021.9375302

M3 - Conference contribution book

SN - 978-1-6654-3024-1

T3 - IEEE International Conference on Micro Electrical Mechanical Systems (MEMS)

SP - 294

EP - 297

BT - 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

PB - IEEE

CY - New York, USA

T2 - 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

Y2 - 25 January 2021 through 29 January 2021

ER -

Janin P, Bauer R , Griffin P , Riis E , Uttamchandani D. A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications. In 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). New York, USA: IEEE. 2021. p. 294-297. (IEEE International Conference on Micro Electrical Mechanical Systems (MEMS)). doi: 10.1109/MEMS51782.2021.9375302

A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Miniaturised 3D-printed biomedical imaging system using optical MEMS - RAE Fellowships (GCRF)

Fast piezoelectric scanning MEMS mirror for 1D ion adressing

Cite this

A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Projects

Miniaturised 3D-printed biomedical imaging system using optical MEMS - RAE Fellowships (GCRF)

Research output

Fast piezoelectric scanning MEMS mirror for 1D ion adressing

Cite this