A design approach to 2-D electrostatic torsional micromirrors with z-axis displacement compensation

L. Li, M. Begbie

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

We report a new method for maintaining constant z-axis displacement of an electrostatic torsional micromirror driven by quadrant electrodes, by adding an additional control electrode. The voltage applied to the control electrode is theoretically related to the voltages applied to the quadrant electrodes. The mathematical model is presented and validated through finite-element analysis.
LanguageEnglish
Pages2422-2424
Number of pages3
JournalIEEE Photonics Technology Letters
Volume18
Issue number22
DOIs
Publication statusPublished - 15 Nov 2006

Fingerprint

Electrostatics
electrostatics
Electrodes
electrodes
quadrants
Electric potential
electric potential
mathematical models
Mathematical models
Finite element method
Compensation and Redress

Keywords

  • biomedical electrodes
  • biomedical optical imaging
  • electrostatics
  • finite element methods
  • mathematical model
  • micromechanical devices
  • micromirrors
  • optical devices
  • optical microscopy
  • voltage control

Cite this

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abstract = "We report a new method for maintaining constant z-axis displacement of an electrostatic torsional micromirror driven by quadrant electrodes, by adding an additional control electrode. The voltage applied to the control electrode is theoretically related to the voltages applied to the quadrant electrodes. The mathematical model is presented and validated through finite-element analysis.",
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A design approach to 2-D electrostatic torsional micromirrors with z-axis displacement compensation. / Li, L.; Begbie, M.

In: IEEE Photonics Technology Letters, Vol. 18, No. 22, 15.11.2006, p. 2422-2424.

Research output: Contribution to journalArticle

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AU - Begbie, M.

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AB - We report a new method for maintaining constant z-axis displacement of an electrostatic torsional micromirror driven by quadrant electrodes, by adding an additional control electrode. The voltage applied to the control electrode is theoretically related to the voltages applied to the quadrant electrodes. The mathematical model is presented and validated through finite-element analysis.

KW - biomedical electrodes

KW - biomedical optical imaging

KW - electrostatics

KW - finite element methods

KW - mathematical model

KW - micromechanical devices

KW - micromirrors

KW - optical devices

KW - optical microscopy

KW - voltage control

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