A design approach to 2-D electrostatic torsional micromirrors with z-axis displacement compensation

L. Li, M. Begbie

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

We report a new method for maintaining constant z-axis displacement of an electrostatic torsional micromirror driven by quadrant electrodes, by adding an additional control electrode. The voltage applied to the control electrode is theoretically related to the voltages applied to the quadrant electrodes. The mathematical model is presented and validated through finite-element analysis.
Original languageEnglish
Pages (from-to)2422-2424
Number of pages3
JournalIEEE Photonics Technology Letters
Volume18
Issue number22
DOIs
Publication statusPublished - 15 Nov 2006

Keywords

  • biomedical electrodes
  • biomedical optical imaging
  • electrostatics
  • finite element methods
  • mathematical model
  • micromechanical devices
  • micromirrors
  • optical devices
  • optical microscopy
  • voltage control

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