A concept of moving dielectrophoresis electrodes based on microelectromechanical systems (MEMS) actuators

L. Li; D.G. Uttamchandani

doi:10.2528/PIERL07122811

A concept of moving dielectrophoresis electrodes based on microelectromechanical systems (MEMS) actuators

L. Li, D.G. Uttamchandani

Electronic And Electrical Engineering

Research output: Contribution to journal › Article

1 Citation (Scopus)

Abstract

A concept of moving dielectrophoresis electrodes (MDEP) based on Microelectromechanical Systems (MEMS) actuators is introduced in this letter. An example design of tuneable dielectrophoresis filter is presented. Finite Element Analysis of the electrostatic field of the tuneable filter has been conducted. Results show that the trapping force can be adjusted by actuating the MEMS actuators.

Original language	English
Pages (from-to)	89-94
Number of pages	5
Journal	Progress In Electromagnetics Research Letters
Volume	2
DOIs	https://doi.org/10.2528/PIERL07122811
Publication status	Published - 2008

Keywords

dielectrophoresis electrodes
microelectromechanical systems
MEMS

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10.2528/PIERL07122811

http://dx.doi.org/10.2528/PIERL07122811

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Li, L., & Uttamchandani, D. G. (2008). A concept of moving dielectrophoresis electrodes based on microelectromechanical systems (MEMS) actuators. Progress In Electromagnetics Research Letters, 2, 89-94. https://doi.org/10.2528/PIERL07122811

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abstract = "A concept of moving dielectrophoresis electrodes (MDEP) based on Microelectromechanical Systems (MEMS) actuators is introduced in this letter. An example design of tuneable dielectrophoresis filter is presented. Finite Element Analysis of the electrostatic field of the tuneable filter has been conducted. Results show that the trapping force can be adjusted by actuating the MEMS actuators.",

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note = "Also presented at Progress in Electromagnetics Research Symposium, 2008.",

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KW - microelectromechanical systems

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