A 3-axis accelerometer and strain sensor system for building integrity monitoring

J. Santana, R. van den Hoven, C. van Liempd, M. Colin, N. Saillen, D. Zonta, D. Trapani, T. Torfs, C. Van Hoof

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)


An Ultra-Low-Power readout architecture for capacitive MEMS-based accelerometers and strain sensors is presented. The system can read both accelerometers and strain sensors in a half-bridge configuration. An accurate VerilogA model of the sensor was made to improve simulations. The gain of the system is controlled by integrating pulses from the excitation circuit allowing accurate control of the Signal-to-Noise ratio. A Figure-of-Merit of 4.41 × 10-20 F√(W/Hz) was achieved for a sensor range of ±2.0 g and ±20,000 με over a 100 Hz bandwidth. A minimum of 440 nW power consumption was recorded. Residual motion artifacts are also cancelled by the system.

Original languageEnglish
Pages (from-to)141-147
Number of pages7
JournalSensors and Actuators A: Physical
Publication statusPublished - Dec 2012


  • bandwidth
  • integrated number of pulses
  • linearity
  • residual motion
  • sensitivity
  • Signal-to-Noise ratio


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