A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators

Lì Lì, Ralf Bauer, Gordon D.A. Brown, Deepak G. Uttamchandani

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

2 Citations (Scopus)

Abstract

A hybrid two-axis scanning micromirror combining electrostatic and electrothermal actuators was fabricated using SOIMUMPs. Experimental evaluation shows the device is capable of scan in two orthogonal directions and produces a rectangular raster-scan pattern.
Original languageEnglish
Title of host publicationInternational Conference on Optical MEMS and Nanophotonics (OMN), 2012
Place of PublicationPiscataway, NJ, United States
PublisherIEEE
Pages73-74
Number of pages2
ISBN (Print)9781457715112
DOIs
Publication statusPublished - 22 Nov 2012

Fingerprint

Electrostatic actuators
microelectromechanical systems
MEMS
Electrostatics
Actuators
actuators
electrostatics
Scanning
scanning
evaluation

Keywords

  • MEMS
  • microactuators
  • optical scanner
  • SOIMUMPs

Cite this

Lì, L., Bauer, R., Brown, G. D. A., & Uttamchandani, D. G. (2012). A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators. In International Conference on Optical MEMS and Nanophotonics (OMN), 2012 (pp. 73-74). Piscataway, NJ, United States: IEEE. https://doi.org/10.1109/OMEMS.2012.6318808
Lì, Lì ; Bauer, Ralf ; Brown, Gordon D.A. ; Uttamchandani, Deepak G. / A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators. International Conference on Optical MEMS and Nanophotonics (OMN), 2012. Piscataway, NJ, United States : IEEE, 2012. pp. 73-74
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Lì, L, Bauer, R, Brown, GDA & Uttamchandani, DG 2012, A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators. in International Conference on Optical MEMS and Nanophotonics (OMN), 2012. IEEE, Piscataway, NJ, United States, pp. 73-74. https://doi.org/10.1109/OMEMS.2012.6318808

A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators. / Lì, Lì; Bauer, Ralf; Brown, Gordon D.A.; Uttamchandani, Deepak G.

International Conference on Optical MEMS and Nanophotonics (OMN), 2012. Piscataway, NJ, United States : IEEE, 2012. p. 73-74.

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

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Lì L, Bauer R, Brown GDA, Uttamchandani DG. A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators. In International Conference on Optical MEMS and Nanophotonics (OMN), 2012. Piscataway, NJ, United States: IEEE. 2012. p. 73-74 https://doi.org/10.1109/OMEMS.2012.6318808