A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators

Lì Lì, Ralf Bauer, Gordon D.A. Brown, Deepak G. Uttamchandani

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

2 Citations (Scopus)

Abstract

A hybrid two-axis scanning micromirror combining electrostatic and electrothermal actuators was fabricated using SOIMUMPs. Experimental evaluation shows the device is capable of scan in two orthogonal directions and produces a rectangular raster-scan pattern.
Original languageEnglish
Title of host publicationInternational Conference on Optical MEMS and Nanophotonics (OMN), 2012
Place of PublicationPiscataway, NJ, United States
PublisherIEEE
Pages73-74
Number of pages2
ISBN (Print)9781457715112
DOIs
Publication statusPublished - 22 Nov 2012

Keywords

  • MEMS
  • microactuators
  • optical scanner
  • SOIMUMPs

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