3-D mapping of strain and defects in a ZnSe epilayer using a variable energy electron beam

C. Trager-Cowan, A. M. Paterson, R. W. Martin, K. P. O'Donnell, J. T. Mullins, G. Horsburgh, K. A. Prior, B. C. Cavenett

Research output: Contribution to journalConference article

Abstract

An electron beam with energy varying between 12 and 30keV was used to investigate the variation in strain as a function of lateral position and as a function of depth in a 2.7μm, nominally undoped ZnSe epilayer. The position dependence of low temperature cathodoluminescence spectra reveals the strain and impurity concentration along the layer to be non-uniform. The lateral distribution of impurities allows their tentative identification. The depth profile shows a correlation between the distribution of misfit dislocations and impurities in the layer.

LanguageEnglish
Pages163-166
Number of pages4
JournalMaterials Science Forum
Volume182-184
Publication statusPublished - 1 Jan 1995
EventProceedings of the 3rd European Workshop on II-VI Compounds - Linz, Austria
Duration: 26 Sep 199428 Sep 1994

Fingerprint

Epilayers
Electron beams
electron beams
Impurities
impurities
Defects
defects
Cathodoluminescence
cathodoluminescence
Dislocations (crystals)
energy
profiles
Temperature

Cite this

Trager-Cowan, C. ; Paterson, A. M. ; Martin, R. W. ; O'Donnell, K. P. ; Mullins, J. T. ; Horsburgh, G. ; Prior, K. A. ; Cavenett, B. C. / 3-D mapping of strain and defects in a ZnSe epilayer using a variable energy electron beam. In: Materials Science Forum. 1995 ; Vol. 182-184. pp. 163-166.
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Trager-Cowan, C, Paterson, AM, Martin, RW, O'Donnell, KP, Mullins, JT, Horsburgh, G, Prior, KA & Cavenett, BC 1995, '3-D mapping of strain and defects in a ZnSe epilayer using a variable energy electron beam' Materials Science Forum, vol. 182-184, pp. 163-166.

3-D mapping of strain and defects in a ZnSe epilayer using a variable energy electron beam. / Trager-Cowan, C.; Paterson, A. M.; Martin, R. W.; O'Donnell, K. P.; Mullins, J. T.; Horsburgh, G.; Prior, K. A.; Cavenett, B. C.

In: Materials Science Forum, Vol. 182-184, 01.01.1995, p. 163-166.

Research output: Contribution to journalConference article

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