3-D mapping of strain and defects in a ZnSe epilayer using a variable energy electron beam

C. Trager-Cowan; A. M. Paterson; R. W. Martin; K. P. O'Donnell; J. T. Mullins; G. Horsburgh; K. A. Prior; B. C. Cavenett

3-D mapping of strain and defects in a ZnSe epilayer using a variable energy electron beam

C. Trager-Cowan, A. M. Paterson, R. W. Martin, K. P. O'Donnell, J. T. Mullins, G. Horsburgh, K. A. Prior, B. C. Cavenett

Research output: Contribution to journal › Conference article › peer-review

Abstract

An electron beam with energy varying between 12 and 30keV was used to investigate the variation in strain as a function of lateral position and as a function of depth in a 2.7μm, nominally undoped ZnSe epilayer. The position dependence of low temperature cathodoluminescence spectra reveals the strain and impurity concentration along the layer to be non-uniform. The lateral distribution of impurities allows their tentative identification. The depth profile shows a correlation between the distribution of misfit dislocations and impurities in the layer.

Original language	English
Pages (from-to)	163-166
Number of pages	4
Journal	Materials Science Forum
Volume	182-184
Publication status	Published - 1 Jan 1995
Event	Proceedings of the 3rd European Workshop on II-VI Compounds - Linz, Austria Duration: 26 Sept 1994 → 28 Sept 1994

Cite this

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title = "3-D mapping of strain and defects in a ZnSe epilayer using a variable energy electron beam",

abstract = "An electron beam with energy varying between 12 and 30keV was used to investigate the variation in strain as a function of lateral position and as a function of depth in a 2.7μm, nominally undoped ZnSe epilayer. The position dependence of low temperature cathodoluminescence spectra reveals the strain and impurity concentration along the layer to be non-uniform. The lateral distribution of impurities allows their tentative identification. The depth profile shows a correlation between the distribution of misfit dislocations and impurities in the layer.",

author = "C. Trager-Cowan and Paterson, {A. M.} and Martin, {R. W.} and O'Donnell, {K. P.} and Mullins, {J. T.} and G. Horsburgh and Prior, {K. A.} and Cavenett, {B. C.}",

year = "1995",

month = jan,

day = "1",

language = "English",

volume = "182-184",

pages = "163--166",

journal = "Materials Science Forum",

issn = "0255-5476",

note = "Proceedings of the 3rd European Workshop on II-VI Compounds ; Conference date: 26-09-1994 Through 28-09-1994",

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TY - JOUR

T1 - 3-D mapping of strain and defects in a ZnSe epilayer using a variable energy electron beam

AU - Trager-Cowan, C.

AU - Paterson, A. M.

AU - Martin, R. W.

AU - O'Donnell, K. P.

AU - Mullins, J. T.

AU - Horsburgh, G.

AU - Prior, K. A.

AU - Cavenett, B. C.

PY - 1995/1/1

Y1 - 1995/1/1

N2 - An electron beam with energy varying between 12 and 30keV was used to investigate the variation in strain as a function of lateral position and as a function of depth in a 2.7μm, nominally undoped ZnSe epilayer. The position dependence of low temperature cathodoluminescence spectra reveals the strain and impurity concentration along the layer to be non-uniform. The lateral distribution of impurities allows their tentative identification. The depth profile shows a correlation between the distribution of misfit dislocations and impurities in the layer.

AB - An electron beam with energy varying between 12 and 30keV was used to investigate the variation in strain as a function of lateral position and as a function of depth in a 2.7μm, nominally undoped ZnSe epilayer. The position dependence of low temperature cathodoluminescence spectra reveals the strain and impurity concentration along the layer to be non-uniform. The lateral distribution of impurities allows their tentative identification. The depth profile shows a correlation between the distribution of misfit dislocations and impurities in the layer.

UR - http://www.scopus.com/inward/record.url?scp=0029228576&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0029228576

SN - 0255-5476

VL - 182-184

SP - 163

EP - 166

JO - Materials Science Forum

JF - Materials Science Forum

T2 - Proceedings of the 3rd European Workshop on II-VI Compounds

Y2 - 26 September 1994 through 28 September 1994

ER -

3-D mapping of strain and defects in a ZnSe epilayer using a variable energy electron beam

Abstract

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