22.3 kHz update rate Lissajous scanning using a single double resonant MEMS scanner

Jay Christopher; Paul Janin; Deepak Uttamchandani; Ralf Bauer

22.3 kHz update rate Lissajous scanning using a single double resonant MEMS scanner

Jay Christopher, Paul Janin, Deepak Uttamchandani, Ralf Bauer

Research output: Contribution to conference › Paper › peer-review

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Abstract

A double resonant MEMS scanner with on-chip frequency tuning capability is presented, which enables generation of two dimensional Lissajous projection patterns with update rates of up to 22.3 kHz. The piezoelectric scanner has an electrothermal frequency tuning capability with simultaneous tuning of 4% and 0.3% of the two orthogonal movement modes, allowing Lissajous scan pattern update rate and fill factor selection.

Original language	English
Number of pages	2
Publication status	E-pub ahead of print - 15 Sep 2022
Event	International Conference on Optical MEMS and Nanophotonics (OMN) 2022 - Online Duration: 12 Sep 2022 → 15 Sep 2022 https://ws.eventact.com/OMN2022/Home

Conference

Conference	International Conference on Optical MEMS and Nanophotonics (OMN) 2022
Abbreviated title	OMN 2022
Period	12/09/22 → 15/09/22
Internet address	https://ws.eventact.com/OMN2022/Home

Keywords

MEMS scanner
lissajous scanning
frequency tuning

Access to Document

Christopher-etal-OMN-2022-223-kHz-update-rate-Lissajous-scanning-using-a-single-double-resonant-MEMS-scannerAccepted author manuscript, 873 KBLicence: Strath_1

1 Active
2 Finished

Doctoral Training Partnership 2020-2021 University of Strathclyde | Christopher, Jay
Bauer, R., Murray, P. & Christopher, J.
EPSRC (Engineering and Physical Sciences Research Council)
1/10/20 → 1/04/24
Project: Research Studentship - Internally Allocated
MEMS-enabled miniaturised multimodal microscopy through pulsed structured illumination
Bauer, R.
EPSRC (Engineering and Physical Sciences Research Council)
6/01/20 → 15/10/22
Project: Research
Miniaturised 3D-printed biomedical imaging system using optical MEMS - RAE Fellowships (GCRF)
Bauer, R.
Royal Academy of Engineering RAE
1/10/16 → 30/09/21
Project: Research Fellowship

1 Article

On-chip frequency tuning of fast resonant MEMS scanner
Janin, P., Uttamchandani, D. & Bauer, R., Dec 2022, In: Journal of Microelectromechanical Systems. 31, 6, p. 977-983 7 p.
Research output: Contribution to journal › Article › peer-review

Open Access
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1 Citation (Scopus)

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Cite this

@conference{fcc232df6de64da3a473b575d8c2127d,

title = "22.3 kHz update rate Lissajous scanning using a single double resonant MEMS scanner",

abstract = "A double resonant MEMS scanner with on-chip frequency tuning capability is presented, which enables generation of two dimensional Lissajous projection patterns with update rates of up to 22.3 kHz. The piezoelectric scanner has an electrothermal frequency tuning capability with simultaneous tuning of 4% and 0.3% of the two orthogonal movement modes, allowing Lissajous scan pattern update rate and fill factor selection.",

keywords = "MEMS scanner, lissajous scanning, frequency tuning",

author = "Jay Christopher and Paul Janin and Deepak Uttamchandani and Ralf Bauer",

note = "{\textcopyright} 2022 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.; International Conference on Optical MEMS and Nanophotonics (OMN) 2022, OMN 2022 ; Conference date: 12-09-2022 Through 15-09-2022",

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day = "15",

language = "English",

url = "https://ws.eventact.com/OMN2022/Home",

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TY - CONF

T1 - 22.3 kHz update rate Lissajous scanning using a single double resonant MEMS scanner

AU - Christopher, Jay

AU - Janin, Paul

AU - Uttamchandani, Deepak

AU - Bauer, Ralf

N1 - © 2022 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2022/9/15

Y1 - 2022/9/15

N2 - A double resonant MEMS scanner with on-chip frequency tuning capability is presented, which enables generation of two dimensional Lissajous projection patterns with update rates of up to 22.3 kHz. The piezoelectric scanner has an electrothermal frequency tuning capability with simultaneous tuning of 4% and 0.3% of the two orthogonal movement modes, allowing Lissajous scan pattern update rate and fill factor selection.

AB - A double resonant MEMS scanner with on-chip frequency tuning capability is presented, which enables generation of two dimensional Lissajous projection patterns with update rates of up to 22.3 kHz. The piezoelectric scanner has an electrothermal frequency tuning capability with simultaneous tuning of 4% and 0.3% of the two orthogonal movement modes, allowing Lissajous scan pattern update rate and fill factor selection.

KW - MEMS scanner

KW - lissajous scanning

KW - frequency tuning

M3 - Paper

T2 - International Conference on Optical MEMS and Nanophotonics (OMN) 2022

Y2 - 12 September 2022 through 15 September 2022

ER -

22.3 kHz update rate Lissajous scanning using a single double resonant MEMS scanner

Abstract

Conference

Keywords

Access to Document

Fingerprint

Projects

Doctoral Training Partnership 2020-2021 University of Strathclyde | Christopher, Jay

MEMS-enabled miniaturised multimodal microscopy through pulsed structured illumination

Miniaturised 3D-printed biomedical imaging system using optical MEMS - RAE Fellowships (GCRF)

Research output

On-chip frequency tuning of fast resonant MEMS scanner

Cite this