Projects per year
A double resonant MEMS scanner with on-chip frequency tuning capability is presented, which enables generation of two dimensional Lissajous projection patterns with update rates of up to 22.3 kHz. The piezoelectric scanner has an electrothermal frequency tuning capability with simultaneous tuning of 4% and 0.3% of the two orthogonal movement modes, allowing Lissajous scan pattern update rate and fill factor selection.
|Number of pages||2|
|Publication status||E-pub ahead of print - 15 Sep 2022|
|Event||International Conference on Optical MEMS and Nanophotonics (OMN) 2022 - Online|
Duration: 12 Sep 2022 → 15 Sep 2022
|Conference||International Conference on Optical MEMS and Nanophotonics (OMN) 2022|
|Abbreviated title||OMN 2022|
|Period||12/09/22 → 15/09/22|
- MEMS scanner
- lissajous scanning
- frequency tuning
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Doctoral Training Partnership 2020-2021 University of Strathclyde | Christopher, Jay
Bauer, R., Murray, P. & Christopher, J.
EPSRC (Engineering and Physical Sciences Research Council)
1/10/20 → 1/04/24
Project: Research Studentship - Internally Allocated
Miniaturised 3D-printed biomedical imaging system using optical MEMS - RAE Fellowships (GCRF)
Royal Academy of Engineering RAE
1/10/16 → 30/09/21
Project: Research Fellowship
- 1 Article
On-chip frequency tuning of fast resonant MEMS scannerJanin, P., Uttamchandani, D. & Bauer, R., Dec 2022, In: Journal of Microelectromechanical Systems. 31, 6, p. 977-983 7 p.
Research output: Contribution to journal › Article › peer-reviewOpen AccessFile