22.3 kHz update rate Lissajous scanning using a single double resonant MEMS scanner

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Abstract

A double resonant MEMS scanner with on-chip frequency tuning capability is presented, which enables generation of two dimensional Lissajous projection patterns with update rates of up to 22.3 kHz. The piezoelectric scanner has an electrothermal frequency tuning capability with simultaneous tuning of 4% and 0.3% of the two orthogonal movement modes, allowing Lissajous scan pattern update rate and fill factor selection.
Original languageEnglish
Number of pages2
Publication statusE-pub ahead of print - 15 Sep 2022
EventInternational Conference on Optical MEMS and Nanophotonics (OMN) 2022 - Online
Duration: 12 Sep 202215 Sep 2022
https://ws.eventact.com/OMN2022/Home

Conference

ConferenceInternational Conference on Optical MEMS and Nanophotonics (OMN) 2022
Abbreviated titleOMN 2022
Period12/09/2215/09/22
Internet address

Keywords

  • MEMS scanner
  • lissajous scanning
  • frequency tuning

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