20172019
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Research Output 2017 2019

  • 2 Article
  • 1 Conference contribution book
  • 1 Review article
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Review article
2018

Promising lithography techniques for next generation logic devices: a review

Hasan, R. M. M. & Luo, X., 23 Apr 2018, In : Nanomanufacturing and Metrology. 15 p.

Research output: Contribution to journalReview article

Open Access
File
Logic devices
Lithography
Extreme ultraviolet lithography
Nanoimprint lithography
Photolithography