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Conference contribution book

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  • 2017

    Nanolithography: status and challenges

    Hasan, R. M. M. & Luo, X., 26 Oct 2017, 23rd International Conference on Automation and Computing (ICAC). Piscataway, NJ.: IEEE

    Research output: Chapter in Book/Report/Conference proceedingConference contribution book

    Open Access
    1 Citation (Scopus)
    22 Downloads (Pure)