Janin, P.,
Bauer, R.,
Griffin, P.,
Riis, E. &
Uttamchandani, D.,
25 Jan 2021,
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). New York, USA:
IEEE,
p. 294-297 4 p. (IEEE International Conference on Micro Electrical Mechanical Systems (MEMS)).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book