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Research Output 2008 2019

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Paper
2018

Characterization of a fast piezoelectric varifocal MEMS mirror

Janin, P., Bauer, R., Griffin, P., Riis, E. & Uttamchandani, D., 29 Jul 2018. 2 p.

Research output: Contribution to conferencePaper

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actuation
Interferometers
microelectromechanical systems
MEMS
Mirrors