Physics & Astronomy
microelectromechanical systems
100%
electrostatics
40%
modulators
37%
actuators
35%
retroreflectors
30%
resonators
29%
free-space optical communication
28%
flexing
26%
cavities
23%
mirrors
23%
solid state lasers
23%
actuation
22%
frequency shift
20%
homogeneity
20%
gas flow
19%
optical communication
18%
sensors
17%
transducers
17%
damping
17%
curvature
16%
vapors
16%
high speed
16%
YLF lasers
14%
silicon
13%
scanning
13%
air
12%
acoustics
12%
modulation
12%
electric potential
11%
laser cavities
11%
travel
10%
continuous radiation
10%
membranes
9%
foundries
9%
repetition
9%
pulse duration
8%
shelves
8%
fabrication
8%
light modulation
8%
frequency ranges
8%
micromachining
8%
hearing
7%
polystyrene
7%
reflectance
7%
microphones
7%
organs
7%
positioning
7%
phase modulation
7%
flow velocity
6%
oscillations
6%
Engineering & Materials Science
MEMS
90%
Ultrasonic flowmeters
35%
Actuators
34%
Resonators
33%
Silicon
31%
Substrates
30%
Optical communication
25%
Poisson ratio
24%
Electrostatics
23%
Modulators
22%
Mirrors
22%
Flow of gases
20%
Foundries
20%
Accelerometers
20%
Transducers
20%
Microactuators
20%
Vapors
19%
Elastic moduli
18%
Acoustics
17%
Scanning
16%
Computational fluid dynamics
16%
Sensors
15%
Natural frequencies
15%
Optical tomography
14%
Modulation
13%
Ultrasonic transducers
12%
Air
11%
Light modulation
11%
Finite element method
11%
Damping
11%
Membranes
10%
Hot Temperature
10%
Surface micromachining
10%
Electric potential
10%
Polystyrenes
9%
Phase modulation
9%
Microsystems
8%
Polysilicon
8%
Audition
8%
Microphones
7%
Modal analysis
7%
Lenses
7%
Heat transfer
7%
Fabrication
6%
Flow rate
6%
Aluminum nitride
6%
Communication systems
5%
Acoustic waves
5%
Lasers
5%