Zygo 3D Optical Profiler

Xichun Luo

Design, Manufacturing And Engineering Management

Facility/equipment: Equipment

James Weir Building

Details

Name	Zygo 3D Optical Profiler
Acquisition date	28/08/13
Manufacturers	Zygo

Contact information

Emails	[email protected]

Terms of loan/booking

Available for loan - internal and external

Data for: "Study on the vertical ultrasonic vibration-assisted nanomachining process on single-crystal silicon"
Fan, P. (Creator) & Luo, X. (Contributor), University of Strathclyde, 1 Oct 2021
DOI: 10.15129/c63e0665-f442-46a2-952b-4cded4c16194
Dataset
Data for: "Processing outcomes of atomic force microscope tip-based nanomilling with different trajectories on single-crystal silicon"
Fan, P. (Creator) & Luo, X. (Contributor), University of Strathclyde, 15 Jul 2021
DOI: 10.15129/bd7aa4bd-6e68-43a8-804f-896ccad71692
Dataset