STPS Multiplex ICP Etch System

Ian Watson

Institute Of Photonics

Facility/equipment: Equipment

LocationShow on map
Technology and Innovation Centre

Description

Under long term repair, as of November 2023.

Details

Name	STPS Multiplex ICP Etch System
Acquisition date	25/06/13

Contact information

Emails	[email protected]
Links	Website

Data for: "Suspension and transfer printing of ZnCdMgSe membranes from an InP substrate"
Chappell, G. (Creator), Guilhabert, B. J. E. (Contributor), Garcia, T. (Contributor), Zhao, K. (Contributor), Watson, I. (Contributor), Dawson, M. (Contributor), Tamargo, M. (Contributor) & Hastie, J. (Supervisor), University of Strathclyde, 11 Nov 2020
DOI: 10.15129/b3974689-3d7c-49d0-ab7a-c7fd7c1f1382
Dataset