STPS Multiplex ICP Etch System

Institute Of Photonics

Facility/equipment: Equipment

  • Technology and Innovation Centre

Description

Hass in-situ monitoring option with laser reflectometer. Process gases include chlorine, oxygen, hydrogen and argon.

Details

NameSTPS Multiplex ICP Etch System
Acquisition date25/06/13

Fingerprint

reflectometers
chlorine
argon
oxygen
hydrogen
gases
lasers

Contact information

Emailsi.m.watson@strath.ac.uk
LinksWebsite