STPS LPX ICP Etch Syst c/w Reflectometer

Facility/equipment: Equipment

  • Technology and Innovation Centre

Equipments Details


Preferred ICP tool for running potentially contaminative processes. Process gases include chlorine, oxygen and argon.


NameSTPS LPX ICP Etch Syst c/w Reflectometer
Acquisition date25/06/13


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